Desktop developing machine

NegotiableUpdate on 02/09

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

The desktop developing machine MSD-150D is mainly used for developing processes after exposure. The equipment mainly consists of a developing chamber unit, an automatic swing arm unit, a liquid supply system, a spindle system, a control system, and a liquid discharge system. The whole machine adopts a frame structure, with a mirror stainless steel surface that is dust-free and does not adsorb particles. The working mode is manual loading and unloading, and the developing process is automatically completed.

Product Details

Desktop developing machineMSD-150D: Used for surface treatment processes that require high uniformity and consistency in development, suitable for silicon wafers, indium phosphide, silicon carbide, gallium nitride, etc. Mainly used for 4- and 6-inch wafers and wafers Suitable for universities, research institutes, and corporate clients.

Our company also provides 8-inch and 12 inch desktop developing machines. For more functions such as blowing air and back washing, please consult.

Desktop developing machineMSD-150D: The developing unit substrate is fixed by vacuum suction with surrounding baffles, and imported servo motors are used to ensure high speed, acceleration, control accuracy, and good repeatability; The liquid supply system adopts the factory or pressure vessel direct liquid supply method.

Desktop developing machineThe MSD-150D control system is controlled by a touch screen and PLC mode, which displays the real-time execution status of various process functions during the operation of the equipment. It can achieve free formula editing, free modification, editing, storage, and debugging of process formulas.

Desktop developing machineTechnical specifications:

project

Specifications

main body

Shell material: Mirror stainless steel

Processing sample size: within 6-inch wafer

Bearing plate: PTFE

Motor:

Speed: 20-3000 R.P.M

Swing arm: automatic

Operating interface: 7-inch touch screen

Developing device

Liquid medicine device:

Developing x1 (temperature control optional)

DIW x1

control system

System: PLC

User interface: 7-inch touchscreen

Recipe: Manual and Automatic Modes

Programming: 50 sets of 20 steps

safety device

Wafer tray vacuum infiltration protection:

Vacuum detection:

Digital setting: Vacuum value lower limit protection

End of operation alarm prompt

Attachment

Vacuum pump x1

Developing tank x1

Deionized water tank x1

Waste liquid tank x1

Vacuum suction cup x1