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E-mail
wll@chenhua.cn
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Phone
18918640152
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Address
No. 488 Lvyuan Road, Anting Town, Jiading District, Shanghai
Shanghai Chenhua Technology Co., Ltd
wll@chenhua.cn
18918640152
No. 488 Lvyuan Road, Anting Town, Jiading District, Shanghai
Gas pressure preparation equipment for silicon nitride ceramic substratesUsage and characteristics:
Pressure sintering molding of silicon nitride ceramic substrates.
(1) Horizontal structure, consisting of furnace body, heating device, vacuum system, atmosphere control system, etc.
(2) The furnace shell material is made of 16MnR pressure vessel steel or 304 stainless steel.
(3) The heating element is made of isostatic pressed graphite, and the insulation layer is made of graphite felt, carbon carbon deep deposition fiber composite material, etc.
(4) Equipped with an imported high-pressure gas mass flow meter to achieve stable sintering under dynamic process atmosphere.
(5) Infrared precise temperature control technology under high-pressure atmosphere, with a special infrared blowing structure, ensures long-term stable sintering at a maximum temperature of 2100 ℃ (not exceeding 2MPa).
Main specifications of pressure preparation equipment for silicon nitride ceramic substrates:
Design temperature 2100 ℃, vacuum Pa, loading area dimensions (length, width, height): 400 × 250 × 250mm, 500 × 450 × 450mm, 1250 × 500 × 500mm, 1400 × 600 × 600mm