Gas mass flow meters and MFCs for negative pressure or vacuum chambers

1Gas mass flow meters and MFCs for negative pressure or vacuum chambers Product Overview:

1. Higher accuracy, faster response, with mesh port;

2. Tubular diversion, not easily blocked;

3. Suitable for various low-pressure and high-pressure pipelines as well as vacuum environments;

4. Short preheating time, minimal drift, high reliability;

5. Analog input/output can be controlled and displayed using secondary meters or flow computers for flow control;

6. Digital communication RS485/232 Modbus, Profibus, Devicenet and other protocols are optional;

2、 Product application:

Vacuum coating/new energy such as solar energy and hydrogen energy/semiconductors/petroleum and petrochemical fine chemicals/power metallurgy

Environmental Protection/Food Packaging/Biopharmaceuticals/New Materials/Industrial Manufacturing/Various Analytical Instruments/Gas Production and Distribution Systems

IIIGas mass flow meters and MFCs for negative pressure or vacuum chambersProduct Parameters:

Full range: 2SCCM~300SLM

Accuracy: ± 0.5% F.S

Linear: ± 0.5% F.S

Repetition accuracy: ± 0.2% F.S

Response time: flowmeter:<0.1s; flow controller:<0.2s

Digital quantity: RS232/485, MODBUS protocol

Analog quantity: 0-5V, 4-20mA, 1-5V

Power supply: ± 15VDC, 24VDC

Working temperature: 0-50 ℃

Working pressure drop:<0.01Mpa (flow meter)

Working pressure difference: 0.1~0.5Mpa (flow controller)

Pressure resistance: 3MPa/10MPa

Leakage rate: 1 × 10-9 SCCSHe

Temperature coefficient: ± 0.025% F.S/℃

Base material: stainless steel

Sealing materials: fluororubber, chloroprene rubber, nitrile rubber, polytetrafluoroethylene, perfluoroether FFKM/FPPM, etc

Connectors: φ 3, φ 6, 1/8 ', 1/4', 3/8 ', 1/2'... card sleeves, flanges, quick plugs, pagodas, etc...

If the required performance requirements are different from the above performance, customization can be communicated.