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E-mail
317399383@qq.com
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Phone
15955179814
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Address
No. 9996 Susong Road, Economic Development Zone, Hefei City, Anhui Province
Product Categories
Hefei Zhongguang Electronic Technology Co., Ltd
Fully automatic glue remover
NegotiableUpdate on 02/09
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Overview
Product Introduction: $n1 Equipment Name: $n2 Automatic Dry Glue Removal Machine $n2 Equipment Model: CGST3100 $n3 Equipment Principle: ICP $n4 Wafer Size: 8 inches (4 or 6 inches compatible) $n5 Wafer Material: Si based (if other materials need to be specified)
Product Details
Fully automatic glue removerProduct Introduction
1. Equipment name: Fully automatic dry adhesive remover
2 Equipment model: CGST3100
3 Equipment principle: ICP
Wafer size: 8 inches (compatible with 4 or 6 inches)
Wafer material: Si based (if it is other materials, please specify)
Fully automatic glue removerparameter
| main body of the equipment | |
| Device dimensions | L1300×W1190×H1847mm |
| Equipment weight | 800Kg |
| equipment power supply | AC220V，3P,50/60Hz， 5-wire, 16A |
| Host software | Windows 10 |
| Host communication | SECS/GEM |
| Host hard drive | single |
| Process chamber | ICP， single cavity |
| Type of material box | Open cassette |
| Single processing capacity of wafer | a piece |
| mechanical arm | 3-axis (single/dual arm optional) |
| mechanical arm | Mapping (optional) |
| Hourly film output (WPH) | 35 tablets/hour (1-minute standard formula) |
| heating plate | Aluminum alloy, temperature control: 50-250 ℃ |
| Plasma generation system | |
| Power type | radio frequency |
| power supply wattage | 0~1000W |
| power frequency | 13.56MHz |
| matcher | auto-match |
| vacuum system | |
| Process chamber | aluminum alloy |
| anus | Door valve, pneumatic |
| 真空管路 | All stainless steel pipes and high-strength vacuum corrugated pipes |
| butterfly valve | Voltage control accuracy: ± 50 mtorr |
| Vacuum pipeline switch | Angle valve, pneumatic |
| vacuum pump | Dry pump: 600m3/h |
| vacuum gauge | 0.001-10 Torr |
| Chamber vacuum switch | 750 Torr |
| Front stage pipeline vacuum switch | 100 Torres |
| Gas system | |
| Process gas system | Gas holder, modular (GAS BOX) |
| Material of gas cabinet body | stainless steel |
| Gas holder exhaust | Negative pressure, acid drainage |
| Gas holder configuration | Filter, manual valve, flow meter, pneumatic valve, differential pressure gauge, speed regulating valve, interlock switch |
| Number of gas pathways | |
| Gas path 1 | O2 5SLM |
| Gas path 2 | N2 1SLM |
| Gas path 3 | CF4 100SCCM |
| Gas path 4 | 4%H2/N2 1SLM |
| Gas path 5 | N2 slow/fast vacuum breaking |
More needs can be communicated by phone.
