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E-mail
317399383@qq.com
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Phone
15955179814
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Address
No. 9996 Susong Road, Economic Development Zone, Hefei City, Anhui Province
Product Categories
Hefei Zhongguang Electronic Technology Co., Ltd
Full cabinet glue coating and development integrated machine
NegotiableUpdate on 02/09
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Overview
Overview of Full Cabinet Glue Coating and Development Integrated Machine: The $r $nSHD6-BE Glue Coating and Development System Integrated Machine is mainly composed of a glue leveling unit, a baking unit, a development unit, and other parts. This equipment is designed for university research institute laboratories and is characterized by a small footprint and higher cost-effectiveness. The whole machine adopts a frame structure, with a stainless steel or PP exterior that is dust-free and does not adsorb particles. It is controlled by a 7-inch operation interface, equipped with FFU, upper exhaust interface, yellow light chamber, gravity waste discharge interface, and each module can work independently. The operation mode is manual up and down sampling.
Product Details
1Full cabinet glue coating and development integrated machineProduct Job Description
1.1 Process steps
Glue coating (dispensing, dripping, spinning, picking) → Oven (dispensing, baking, picking) → Transfer to the next process (exposure) → Development (dispensing, spinning, washing, spin drying, picking) → (Transfer to the next process).
1.2 Control System
The control system consists of a 7-inch touch screen and PLC control mode, which displays the real-time execution of various process functions during the operation of the equipment. It can achieve free formula editing, free modification, editing, storage, and calling of process formulas.
IIFull cabinet glue coating and development integrated machineSpecifications
Project/Item |
Specifications |
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main body
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Appearance: Stainless steel Module: Uniform glue, hot plate, developing; |
Rotating coating module |
Speed: 20-5000 R.P.M Speed accuracy: ± 1 rpm 加速度： 350-10000RPM/S Deceleration rate: 350-10000 RPM/S Time: 1-3000S Uniformity: ≤ 2% Control mode: PLC Recipe: 50 sets of 20 steps Attachment: Oil free vacuum pump Suction cup specifications (10mm, 25mm, 2-inch, 4-inch, 6-inch, and embedded optional) |
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Baking module
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Temperature range: RT~300 ℃ Processing size ≤ Ø 200mm Temperature uniformity ≤± 1.5% Temperature control accuracy ± 0.2 ℃ |
Development parameters |
Processing sample size: within 6 inches Undertaking: Teflon Speed: 20-3000 R.P.M Speed accuracy: ± 1RPM Swing arm: automatic Liquid medicine device: one path for development, one path for water Formula: Multi step programming and program storage Attachment: One oil-free vacuum pump; One suction cup (compatible with 4 and 6 inches) |
IIISystem Requirements
project |
Description&Specifications |
System Requirements |
Exhaust:160 m³/h Vacuum:>-60 Kpa Compressed air: 5kg Nitrogen/: 3kg Water 4 * 6mm 2.0Kgf/cm ² Voltage: 220V \ \ 50HZ |
4、 Equipment size
4.1Size&Weight
Reference dimensions: (width * depth * height) 1600 * 800 * 2000mm
Weight: 300KG
