Focused ion beam scanning electron microscope Crossbeam

ZeissFocused ion beam scanning electron microscope CrossbeamThe FIB-SEM combines the excellent imaging and analysis performance of field emission scanning electron microscopy (FE-SEM) with the outstanding processing performance of the new generation focused ion beam (FIB). Whether in scientific research or industrial experimentation, you can achieve multi-user simultaneous operation on one device. Thanks to the modular platform design concept of the Zeiss Crossbeam series, you can upgrade your instrument system at any time according to your changing needs. The Crosssbeam series will greatly enhance your application experience in processing, imaging, or implementing 3D reconstruction analysis.

With the Gemini electron optical system, you can extract real sample information from high-resolution SEM images

By using the new lon culptor FlB tube and a novel sample processing method, you can maximize sample quality, reduce sample damage, and greatly accelerate the experimental process. With the low voltage function of lon culptor FlB, you can prepare ultra-thin TEM samples while reducing amorphous damage to a very low level

Using the variable air pressure function of Crossbeam 340

Or use Crossbeam 550 to achieve more stringent characterization, and the large warehouse even provides you with more choices

EM sample preparation process

Follow the steps below to efficiently and effectively complete sample preparation with high quality

Focused ion beam scanning electron microscope CrossbeamWe provide a complete solution for preparing ultra-thin and high-quality TEM samples, allowing you to efficiently prepare the samples and achieve transmission imaging mode analysis on TEM or STEM.

Easy navigation of regions of interest (ROI) 1. Automatic localization

You can easily find the area of interest (ROI) without any effort by using the navigation camera in the sample exchange room to position the sample. The integrated user interface allows you to easily locate the ROI

Obtain wide field of view and distortion free images on SEM

2. Automatic sample preparation - starting from the bulk material to prepare thin slice samples

You can prepare samples in three simple steps: ASP (Automatic Sample Preparation) defines parameters including drift correction, surface deposition, and rough and fine cutting. The ion optical system of the FIB tube ensures a high throughput workflow and exports parameters as copies, enabling batch preparation with repeated operations

3. Easy Transfer - Sample Cutting, Mechanized Transfer

Find the robotic arm and weld the thin film sample onto the needle tip of the robotic arm

Cut the connection between the thin film sample and the sample substrate to separate them. The thin film will then be extracted and transferred to the TEM grid

4. Sample thinning - a crucial step in obtaining high-quality TEM samples. The instrument is designed to allow users to monitor the sample thickness in real time and ultimately achieve the desired target thickness. You can simultaneously determine the thickness of the thin film by collecting signals from two detectors. On the one hand, the SE detector can obtain the final thickness with high repeatability, and on the other hand, the lnlens SE detector can control the surface quality

Prepare high-quality samples and reduce amorphous damage to a negligible level