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E-mail
317399383@qq.com
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15955179814
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No. 9996 Susong Road, Economic Development Zone, Hefei City, Anhui Province
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Hefei Zhongguang Electronic Technology Co., Ltd
Film Thickness Gauge
NegotiableUpdate on 02/09
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Overview
The film thickness measuring instrument uses the principle of reflection interference for non-destructive measurement, measuring the thickness and refractive index of thin films on absorbing or transparent substrates, while providing sample reflectivity. The measurement accuracy reaches angstrom level resolution, with fast measurement, simple operation, user-friendly interface, and measurement time of less than 1 second. It can be applied to measure the thickness of thin film layers such as photoresists, semiconductor materials, and polymer materials, and has been widely used and highly praised in the semiconductor, solar, liquid crystal panel, optical industries, as well as research institutes and universities.
Product Details
Film Thickness GaugeMeasurement system specifications:
Basic function: Obtain film thickness values and R, N/K spectra, etc
Spectral analysis range: 380nm-1000nm
Measurement of spot size: standard 1.5mm, minimum 0.5mm
Film thickness repeatability measurement accuracy: 0.02nm (100nm silicon-based SiO2 sample, 100 repeated measurements)
Film thickness accuracy: between 0.2% or 2nm, whichever is larger
Film thickness measurement range: 15nm-70 μ m
Thickness requirement for measuring n and k values: above 100nm
Single point measurement time: ≤ 1s
Light source: Standard halogen lamp light source (light source lifespan of 2000 hours)
Analysis software: up to hundreds of optical material constant databases, and supports user-defined optical material libraries; Provide modeling, simulation, and analysis capabilities for multi-layer isotropic optical thin films
Film Thickness GaugeSample table specifications:
Substrate size: Supports sample sizes up to 150 * 150mm (can be upgraded to customize different size sample tables)
Measurement and analysis software
Spectral measurement capability: Reflectance spectral measurement
Data analysis ability: film thickness analysis ability, optical constants (refractive index and extinction coefficient)
Support commonly used optical constant models and commonly used oscillator models (Cauchy model, Lorentz model, Gaussian model, etc.)
Support user customization, offline analysis software to simulate actual measurements, support Windows 10 operating system
