Ferroelectric comprehensive testing system TSMC/TSC testing

FETS-2000 is an extended and flexible ferroelectric comprehensive testing system TSDC/TSC, which can test hysteresis loops to calculate energy storage density and has the function of testing thermal stimulation current TSDC/TSC. It can be widely applied in research fields such as various ferroelectric/piezoelectric/pyroelectric thin films, thick films, bulk materials and electronic ceramics, ferroelectric sensors/actuators/memories, etc.

Main performance indicators for ferroelectric parameter testing:

a. External 5 kV high voltage amplifier (expandable to 10 kV) (applicable to both domestic and imported);

b. The frequency range for dynamic hysteresis loop testing is 0.01 Hz to 5 kHz;

c. Maximum charge resolution: 10 mC (scalable)；

d. Fatigue test frequency 300 kHz (amplitude 10 Vpp, load capacitance 1 nF);

e. TSMC/TSC current measurement range is 1 pA to 1 uA (expandable), with a resolution of 10 fA;

f. Equipped with high-voltage breakdown protection module；

g. Temperature range: -160 ℃ to 260 ℃.

This testing system consists of a main controller, a high-voltage amplifier, a variable temperature comprehensive testing platform (equipped with a ferroelectric testing box) or a high and low temperature probe station (equipped with a high-voltage probe), a computer, and system software. The main controller integrates functions such as programmable waveform generator, built-in driving voltage, charge integrator, programmable amplifier, analog-to-digital converter, communication bus, etc. The main controller provides an external high-voltage amplifier interface that can be extended to ± 5 kV or ± 10 kV high-voltage amplifiers. The system software includes visual data acquisition and management functions. During testing, hysteresis, pulse, leakage, IV and other performance tests can be achieved without changing the connection of the test sample.

The ferroelectric performance testing of this testing system adopts an improved approachSawyer- TowerCompared with the traditional Sawyer Tower mode, this circuit eliminates external capacitors and reduces the influence of parasitic components in the measurement method. The testing accuracy of this circuit depends only on the accuracy of the integrator capacitor, reducing the impact on the testing process, making it easy to calibrate and calibrate, and achieving high measurement accuracy.

Ferroelectric comprehensive testing system TSMC/TSC testingAdopting modular design, different modules correspond to different electrical characteristic measurements. The main functions are:

Dynamic hysteresis loop DHM

Static hysteresis loop SHM

I-V characteristics

Pulse PUND

Fatigue

Electric breakdown strength BDM

High voltage leakage current test LM

TSMC/TSC testing

Current bias voltage

Maintaining Strength RM

Imprint imprint IM

Temperature variation test THM.