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Hefei Zhongguang Electronic Technology Co., Ltd
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Hefei Zhongguang Electronic Technology Co., Ltd

  • E-mail

    317399383@qq.com

  • Phone

    15955179814

  • Address

    No. 9996 Susong Road, Economic Development Zone, Hefei City, Anhui Province

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Desktop imaging device

NegotiableUpdate on 02/09
Model
Nature of the Manufacturer
Producers
Product Category
Place of Origin
Overview
The desktop imaging device MSD-150D is mainly used in the development process after exposure. The equipment mainly consists of a developing chamber unit, an automatic swing arm unit, a liquid supply system, a spindle system, a control system, and a liquid discharge system. The whole machine adopts a frame structure, with a mirror stainless steel surface that is dust-free and does not adsorb particles. The working mode is manual loading and unloading, and the developing process is automatically completed. The developing unit substrate of the $r $n desktop imaging device is fixed by vacuum suction with surrounding baffles, and imported servo motors are used to ensure high speed, acceleration, control accuracy, and good repeatability; The liquid supply system adopts the factory or pressure vessel direct liquid supply method.
Product Details

Desktop imaging deviceMSD-150D is used for surface treatment processes that require high uniformity and consistency in development, suitable for silicon wafers, indium phosphide, silicon carbide, gallium nitride, etc. Mainly used for 4- and 6-inch wafers and wafers Suitable for universities, research institutes, and corporate clients.

Our company also provides 8-inch and 12 inch desktop developing machines. For more functions such as blowing air and back washing, please consult.

Desktop imaging deviceTechnical specifications:

project

Specifications



main body

Shell material: Mirror stainless steel

Processing sample size: within 6-inch wafer

Bearing plate: PTFE

Motor:

Speed: 20-3000 R.P.M

Swing arm: automatic

Operating interface: 7-inch touch screen


Developing device

Liquid medicine device:

Developing x1 (temperature control optional)

DIW x1



control system

System: PLC

User interface: 7-inch touchscreen

Recipe: Manual and Automatic Modes

Programming: 50 sets of 20 steps



safety device

Wafer tray vacuum infiltration protection:

Vacuum detection:

Digital setting: Vacuum value lower limit protection

End of operation alarm prompt



Attachment

Vacuum pump x1

Developing tank x1

Deionized water tank x1

Waste liquid tank x1

Vacuum suction cup x1