CIF pilot plasma cleaning machine CPC-10 series

NegotiableUpdate on 01/04

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

CIF has launched a new generation of CPC-10 laboratory plasma cleaning equipment, changing the design concept of traditional plasma cleaning equipment. It has a large cavity size and effective sample processing area, low operating cost, high cost-effectiveness, fast and efficient processing, and is particularly suitable for small-scale pilot production in universities, research institutes, and optoelectronic enterprise laboratories.

Product Details

Product Features:

◆7-inch color touch screen with interactive operation interface in both Chinese and English, automatic control and monitoring of process parameter status, 20 formula programs, and traceable process data storage.

◆The PLC industrial computer controls the entire cleaning process, with two working modes: manual and automatic.

◆Quartz vacuum chamber, vacuum pipeline system adopts316 stainless steel material, corrosion-resistant and pollution-free.

◆By using a mass flow meter, precise control of gas input can be achieved, changing the problem of inaccurate gas flow control in traditional float flow meters.

◆HEPA high-efficiency filtration, gas backfilling and purging to prevent secondary pollution.

◆The 60 degree tilt angle operation interface design conforms to ergonomics, is easy to operate, and has a friendly interface.

◆Top mounted vacuum chamber, top opening cover design, downward pressure hinge switch method, convenient opening and closing cover.

◆Adopting a showerhead style porous air intake method to address the issue of uneven single hole air intake in traditional plasma cleaning machines.

◆Upward styleThe design of a 360 degree free horizontal sample tray conforms to ergonomics and is more convenient to operate.

◆Large effective cleaning area, capable of cleaning the maximum diameter8-inch silicon wafer.

◆Security protection, the cabin door opens and the power is automatically turned off.