Brooke step instrument probe surface profilometer

Probe type profilometer/step meter- Deck Pro.

Mature technology and enhanced performance

Decorate Pro

Brooke step instrument probe surface profilometerDektak Pro ™ It is widely praised for its versatility, ease of use, and accurate accuracy in measuring film thickness, step height, stress, surface roughness, and wafer warpage. The 11th generation Dektak ® The system has excellent performance with 4 Å repeatability and provides a 200mm platform option, which can provide various analyses for the surface morphology of materials in scientific research and industrial fields. In terms of surface measurement, Dektak Pro is an ideal choice for microelectronic technology, thin films and coatings, and life science applications.

More accurate precisiondegree

In probe based profilometer measurement, the probe tip moves along the surface to obtain height information of each point along the trajectory, thereby achieving high-resolution surface morphology analysis. Probe based profilometers are widely recognized for their high precision and low cost, and new technological advancements have further improved speed and versatility to meet the constantly changing demands of precision engineering applications.

Powerful performance and repeatability

Dektak Pro, with its powerful resolution, stability, robustness, and durability, ensures reliable high-quality results for years or even decades to come. The new model inherits innovation on the Dektak platform, providing higher resolution, lower noise, and more convenient probe replacement, all of which are crucial for optimizing system repeatability and accuracy.

Under appropriate conditions, Dektak Pro can even measure step heights of 1 nanometer and achieve repeatability better than 4 Å on a 1 micrometer step height standard.

Performance is reflected in the details

Brooke step instrument probe surface profilometerThe single arch design of Dektak Pro effectively reduces sensitivity to adverse environmental conditions such as noise and vibration, while also accommodating large-scale sample testing. The application of the new generation of intelligent electronic technology has greatly reduced temperature changes and electronic noise, thereby reducing errors and uncertainties in high-precision measurements.

The low inertia sensor (LIS 3) enables the system to quickly adapt to sudden changes in surface morphology, maintaining accuracy and responsiveness in dynamic measurement scenarios. Probe replacement technology eliminates the need for misalignment and system recalibration through self-aligning probe fixtures, making probe replacement easy and taking less than a minute.

Quickly obtain results

Dektak Pro adopts direct drive scanning platform technology, which greatly reduces measurement time without affecting resolution and noise floor, thereby accelerating the acquisition speed of 3D morphology or long contour scanning results, while maintaining excellent data quality and repeatability.

Vision64 ® The software adopts 64 bit parallel processing technology, which can achieve fast data processing even when facing big data. In addition, the automated multi scan analysis operation simplifies repetitive tasks, enhances speed and convenience.

More convenient operation

The data collection was conducted in Bruker's Vision64 software, which features a simplified graphical user interface, combined with intelligent architecture, intuitive visualization workflows, and rich user-defined automation functions. Dektak Pro further improves the data collection experience, specifically in:

● Smaller optical distortion, keeping the entire field of view in clear focus, making it easy to quickly locate the testing location of interest

A single measuring head can cover step heights of 1 nm to 1 mm and loads of 1 to 15 mg (as low as 0.03 mg in N-Lite+mode) without the need for recalibration

● Simple operator graphical user interface for automated measurement settings and simplified operations

Expand your analytical skills

The data analyzer in Vision64 makes analysis more powerful and simple through data filtering, automatic leveling, automatic step detection, and recipe capabilities.

• Step height

Dektak Pro's powerful new step height algorithm provides reliable and comprehensive results for various complex surface contour measurements. Its automated analysis program can also minimize the impact of users on the calculation of step height, improving the consistency and objectivity of data interpretation.

• Surface roughness and ripples

Dektak Pro provides a cost-effective and user-friendly solution for quantifying surface roughness, texture, and waviness with high precision. Multiple probe specifications, user-defined probe forces (1-15 mg, as low as 0.03 mg with N-Lite+), and a vertical measurement range of up to 1mm make measurements possible on various surfaces.

2D stress measurement

With Dektak Pro, users have powerful control in 2D stress analysis. By removing and fitting boundaries through user-defined outliers, more reproducible and high-precision stress measurements can be achieved.

• Wafer warpage mapping and 3D stress measurement

Accurately assessing the deformation caused by membrane stress is crucial for developing controllable processes and preparing high-quality devices. Dektak Pro accurately measures membrane stress that may cause deformation, cracking, and interlayer delamination.

Comprehensive application environment

Dektak Pro meets the needs of research and development, process development, as well as current and future quality assurance/quality control (QA/QC), and is suitable for a variety of industrial and research applications, including:

Microelectronics

Monitoring sedimentation and etching processes

Measuring device and sensor height

Evaluate groove depth

• Thin films and coatings

Verify UV/hardening coating on glasses

Optimize the decorative coating on faucets/accessories

Analyze the thickness of paint or ink coating

• Life Sciences

Analyze the thickness of biological materials

Evaluate the surface morphology of biosensors

Characterization of microfluidic channels