Brook Dektak series stair step meter/probe type profilometer

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Brook Dektak series stair step meter/probe type profilometer

_Brook Dektak series stair step meter/probe type profilometerSuitable for various fields such as nanoscale surface measurement and surface morphology analysis, with over 50 years of research and development experience, mature technology, and reliable performance.

The device can achieve excellent repeatability of 4 Å (0.4nm) and fast scanning speed, providing support for nanoscale surface morphology measurement technology in industries such as microelectronics, semiconductors, touch screens, solar energy, high brightness LEDs, medical and materials science, thin films and coatings, and life science applications.

Brook's new generation of stair step measuring equipment - Dektak Pro

Dektak Pro ™ It is widely praised for its versatility, ease of use, and accurate accuracy in measuring film thickness, step height, stress, surface roughness, and wafer warpage. The 11th generation Dektak ® The system has excellent performance with 4 Å repeatability and provides a 200mm platform option, which can provide various analyses for the surface morphology of materials in scientific research and industrial fields. In terms of surface measurement, Dektak Pro is an ideal choice for microelectronic technology, thin films and coatings, and life science applications.

Powerful performance and repeatability

Dektak Pro, with its powerful resolution, stability, robustness, and durability, ensures reliable high-quality results for years or even decades to come. The new model inherits innovation on the Dektak platform, providing higher resolution, lower noise, and more convenient probe replacement, all of which are crucial for optimizing system repeatability and accuracy.

Under appropriate conditions, Dektak Pro can even measure step heights of 1 nanometer and achieve repeatability better than 4 Å on a 1 micrometer step height standard.

Performance is reflected in the details

The single arch design of Dektak Pro effectively reduces sensitivity to adverse environmental conditions such as noise and vibration, while also accommodating large-scale sample testing. The application of the new generation of intelligent electronic technology has greatly reduced temperature changes and electronic noise, thereby reducing errors and uncertainties in high-precision measurements.

The low inertia sensor (LIS 3) enables the system to quickly adapt to sudden changes in surface morphology, maintaining accuracy and responsiveness in dynamic measurement scenarios. Probe replacement technology eliminates the need for misalignment and system recalibration through self-aligning probe fixtures, making probe replacement easy and taking less than a minute.

Quickly obtain results

Dektak Pro adopts direct drive scanning platform technology, which greatly reduces measurement time without affecting resolution and noise floor, thereby accelerating the acquisition speed of 3D morphology or long contour scanning results, while maintaining excellent data quality and repeatability.

Vision64 ® The software adopts 64 bit parallel processing technology, which can achieve fast data processing even when facing big data. In addition, the automated multi scan analysis operation simplifies repetitive tasks, enhances speed and convenience.

Classic and Reliable Step Gauge - Dektak XT

The Brook DektakXT probe based profilometer (step gauge) adopts a revolutionary desktop design, combined with matureThe technology and design have achieved the unity of high performance, high usability, and high cost-effectiveness, with better process control from research and development to quality control.

Equipment characteristics:

-Powerful performance, with a step height reproducibility of less than 4 Å

-Single arch design provides breakthrough scanning stability

-Upgraded 'intelligent electronic devices' to improve testing accuracy and stability

-Optimized hardware configuration reduces data collection time by 40%

-64 bit and Vision64 synchronous data processing software have increased data analysis speed tenfold

-Intuitive Vision64 user interface, easier to use

-Needle tip automatic calibration system, allowing users to easily replace needle tips and probes

-Wide range of probe models

-Single sensor design

-Ensure high-throughput testing

Probe based profilometer system/stair step system-Dektak XTL

The Dektak XTL probe profilometer system (stair step system) is a probe profilometer system designed for applications such as large wafer and panel manufacturing. It can accommodate samples up to 350mm x 350mm, with high-precision scanning performance and excellent repeatability and reproducibility.

The equipment adopts air vibration isolation and fully enclosed workstation design, with easy-to-use interlocking doors that can be used in harsh production environments. Dual camera architecture can enhance spatial perception capability. A high level of automation can maximize the testing throughput.

Product Features:

-The powerful performance of Dektak series stair treaders

-Single arch architecture, integrated vibration isolation system, and large interlocking door

-Larger and supports high-precision encoding XY sample workbench

-Dual camera control system

-Convenient analysis and data collection

-N-Lite low force, using soft touch technology

-Reliable automation settings and operations

-Enhanced analysis software

-Needle tip automatic calibration system, allowing users to easily replace needle tips and probes

-Wide range of probe models