Bipolar series ESC DC power supply

NegotiableUpdate on 01/07

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

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Overview

ESC DC Power, also known as ESC DC Power, is a DC high-voltage electrostatic power supply specifically designed for electrostatic chucks (ESC). This product is a bipolar output power supply that can provide both positive and negative DC voltages simultaneously. It is connected to the DC electrode of the electrostatic chuck through a dedicated cable and filtering circuit, providing the electrostatic chuck with a DC high-voltage that generates suction force.

Product Details

innovation points

Capable of polarity reversal and discharge function

Can achieve polarity reversal function of unipolar/bipolar output voltage; Built in automatic discharge circuit, which can quickly and safely release the remaining charge on the electrostatic chuck.

Capable of monitoring function

It can achieve monitoring functions for output voltage, output current, and input bias (CT), and can provide real-time feedback through analog or digital signals to ensure compliance with specific process requirements.

Equipped with output protection mechanism

Equipped with overvoltage protection, the output is turned off when the output voltage exceeds the set value by 10%; It has overcurrent protection and can set a current limit value through the control terminal. When the output current exceeds the set value by 10%, the output will be turned off.

Application field

Semiconductor - Integrated Circuit

Semiconductor - Packaging

Semiconductor display

Semiconductor lighting

technical indicators

model	BEC0402	BEC0301	BE1200/BEC1200
power input	24VDC，1A		24VDC，2A
output voltage	0~±2000Vdc（ 4000Vdc）	0~±1500Vdc（ 3000Vdc）	0~±6000Vdc（ 12000Vdc）
Output voltage accuracy	Within the range of 1000Vdc-4000Vdc, the error is within 1% (of set point) Set value<1000Vdc, actual error value=set value ± 10Vdc	Within the range of 1000Vdc-3000Vdc, the error is within 1% (of set point); Set value<1000Vdc, actual error value=set value ± 10Vdc;	Within the range of 1000Vdc~12000Vdc, the error is within 1% (of setpoint)
output current	0~10V：0~2mA max		0~10V : 0~1mA max
Linear error of output voltage	30Vdc-4000Vdc， Within 1%	30Vdc-3000Vdc， Within 1%	1000Vdc-12000Vdc， Within 1%
contact method	Manual, 25 pin I/O, RS232
CT(Center-Tap)	Detectable/configurable, 0-10V: 0VDC~-2000VDC	Detectable/adjustable, 5-10V: -1000VDC~+1000Vdc	none
Other instructions	Upgrade bipolar serial port to set CT function	upgrade function (1) New VR+/VR instruction: Allow/Disable polarity reversal mode (2) New SCT instruction: Set CT value (3) Added current limiting and pressure maintaining function	BEC1200 supports dual positive and dual negative functions
HV ground isolation	＞10M
Input/output isolation	＞500M
polarity inversion	support
Discharge function	support
protection mechanism	Overvoltage protection, overcurrent protection