AIXTRON machine thermometer EX-C-7FL

NegotiableUpdate on 05/07

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

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Overview

The AIXTRON machine thermometer EX-C-7FL is a high-precision sapphire tube pyrometer produced by BASF, which is used as the bottom temperature measurement system (BOTTOM TEMPERTURE MONITOR) for AIXTRON G3, G4, G5 MOCVD machines.

Product Details

Main Features

Using shortwave for low-temperature measurement	High precision, resolution up to 0.01 º C, temperature measurement accuracy of 1.5 º C
Temperature measurement repeatability of 0.1 º C, temperature drift not exceeding 0.1 º C/year	Measurement speed reaches 1000 values per second
Digital/or analog output, easy to integrate into control systems

detailed explanation

AIXTRON machine thermometer EX-C-7FLThe high-precision sapphire tube pyrometer produced by BASF is used as a temperature measurement system for the bottom of AIXTRON G3, G4, G5 MOCVD machines.

AIXTRON machine thermometer EX-C-7FLIt includes EI110 sensors, optical fibers, sapphire tubes, IFD5 digital modules, IFA5 analog modules, supporting cables, etc. The temperature measurement range covers 100-1800 ℃, with an accuracy of up to 1.5 ℃ and a repeatability of 0.1 ℃.

BASF Exactus ® Series thermometerIt has been widely used in semiconductor processes such as rapid annealing, rapid oxidation, and thin film deposition, and has been integrated into multiple MOCVD equipment and other RTP equipment such as AIXTRON, LPE, Premtek, etc. In addition, due to its high temperature measurement accuracy and stability, it is also used as a temperature standard by some high-temperature blackbody furnace manufacturers, such as Thermogauge.

Typical Applications

RTP temperature control	MOCVD temperature control
MBE temperature control	Temperature standard

Technical specifications

measurement parameters
Temperature range:	100 – 1800℃
Working wavelength:	1550nm
Measurement accuracy:	Better than 1.5 ℃ or 0.15% measured value
resolution	最高0.01℃
Repetition accuracy:	0.1℃
Temperature drift:	Maximum 0.10 ℃/year Environment: 0.05 ℃/℃ @ 20-45 ℃, 0.10 ℃/℃ @ other temperatures
camera lens:	Sapphire light tube

physical parameters
Power supply:	12-28 VDC, 3W
Storage temperature:	-20 to 70℃
ambient temperature	Electronic components: 0-60 ℃ Specialized lens for harsh environments: 0-250 ℃ High temperature optical fiber: 0-250 ℃
Shell material:	Sensor and lens casing, made of 304 stainless steel/aluminum; Air blown casing, made of aluminum; Special lens for harsh environments: 304 stainless steel;
Weight:	Standard pyrometer, 0.510 kg (1.125 lbs.) Fiber optic sensor, 0.198 kg (7 oz.)