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Address
11th Floor, Building D, Runhui Technology Park, No. 18 Shenzhou Road, Huangpu District, Guangzhou
Guangzhou Yuwei Biotechnology Instrument Co., Ltd
11th Floor, Building D, Runhui Technology Park, No. 18 Shenzhou Road, Huangpu District, Guangzhou
Product Introduction
Thermo Fisher Surface Cal Particle Size Standard (Dry)Can be used to simplify the preparation work for calibrating wafers in your factory. The particle size that can be provided is consistent with the calibration point size required by the instrument manufacturer.
By placing the Surf Cal series NIST traceable polystyrene particles on specially selected chips, you can perform regular calibration checks and compare your scanner with scanners from other locations.
measurement method
To ensure direct traceability to NIST, the certified diameters of these products are obtained through transfer from NIST standard reference material 2 using a projection electron microscope or optical microscope. The uncertainty is calculated based on NIST Technical Note 1297, 1994 edition - Guidelines for Evaluating and Expressing Uncertainty in NIST Measurement Results. The uncertainty value indicated in the certification certificate is the expanded uncertainty using a coverage factor of 2 (K=2).
The peak diameter is calculated using the range of particle size distribution ± 2s. The calculated size distribution serves as the standard offset plot for the peak values. The coefficient of variation refers to the percentage of a standard deviation to the peak diameter. The FWHM distribution is calculated as the percentage of the peak diameter occupied by the distribution with half peak height.
Technical specifications
Thermo Fisher Surface Cal Particle Size Standard (Dry)
component |
polystyrene |
density |
1.05 g/cm3 |
Refractive index |
1.59 @ 589 nm (25°C) |
additive |
nothing |
Certified peak diameter |
Expand uncertainty |
SD |
Size distribution |
FWHM % |
Bottled specifications |
Item number (particle count/mL) |
|
3 x 108 |
1010 |
||||||
0.047 μm |
0.002 μm |
0.004 μm |
7.5% |
17.4% |
50 mL |
PD-047 |
PD-047B |
0.064 μm |
0.002 μm |
0.003 μm |
5.4% |
10.9% |
50 mL |
PD-064 |
PD-064B |
0.083 μm |
0.002 μm |
0.004 μm |
4.2% |
9.6% |
50 mL |
PD-083 |
PD-083B |
0.092 μm |
0.005 μm |
0.004 μm |
4.6% |
9.1% |
50 mL |
PD-092 |
PD-092B |
0.100 μm |
0.005 μm |
0.004 μm |
2.6% |
5.2% |
50 mL |
PD-100 |
PD-100B |
0.126 μm |
0.006 μm |
0.003 μm |
2.4% |
4.8% |
50 mL |
PD-125 |
PD-125B |
0.155 μm |
0.003 μm |
0.003 μm |
1.6% |
3.7% |
50 mL |
PD-155 |
PD-155B |
0.202 μm |
0.005 μm |
0.004 μm |
1.8% |
4% |
50 mL |
PD-200 |
PD-200B |
0.204 μm |
0.008 μm |
0.004 μm |
1.8% |
3.7% |
50 mL |
PD-204 |
PD-204B |
0.220 μm |
0.007 μm |
0.003 μm |
1.6% |
3.3% |
50 mL |
PD-215 |
PD-215B |
0.304 μm |
0.005 μm |
0.004 μm |
1.4% |
3.4% |
50 mL |
PD-305 |
PD-305B |
0.360 μm |
0.013 μm |
0.010 μm |
2% |
5% |
50 mL |
PD-365 |
PD-365B |
0.498 μm |
0.010 μm |
0.006 μm |
1.1% |
2.5% |
50 mL |
PD-500 |
PD-500B |
0.809 μm |
0.014 μm |
0.006 μm |
0.8% |
1.8% |
50 mL |
PD-800 |
PD-800B |
0.802 μm |
0.011 μm |
0.009 μm |
1.1% |
2.4% |
50 mL |
PD-802 |
PD-802B |
1.112 μm |
0.018 μm |
0.011 μm |
1% |
2.5% |
50 mL |
PD1100 |
PD1100B |
1.59 μm |
0.02 μm |
0.016 μm |
1% |
2.6% |
50 mL |
PD1600 |
-- |
2.01 μm |
0.04 μm |
0.019 μm |
1% |
3.3% |
50 mL |
PD2000 |
-- |
3.04 μm |
0.06 μm |
0.026 μm |
0.9% |
2.7% |
50 mL |
PD3000 |
-- |
To learn about or inquire about other series of products from Thermo Fisher, please call for consultation.