molecular pump unit

NegotiableUpdate on 02/09

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

Molecular pump groups are mainly used in various fields such as vacuum coating, semiconductor, electronics, accelerator technology, plasma technology, physical and chemical laboratories, electric vacuum device manufacturing, and vacuum.

Product Details

molecular pump unitFeatures:

★ Vacuum degree reading and display function, integrated design

★ Compact structure, small volume, easy to place and transport

★ Built in air breaking solenoid valve in the system

★ Maximum vacuum degree of 10-8mbar

★ Plug and play design enables simple one click operation

Purpose:

molecular pump unitMainly used in vacuum coating, semiconductor, electronics, accelerator technology, plasma technology, physical and chemical laboratories, electric vacuum device manufacturing, and various fields of vacuum. Can be used in conjunction with Jiangmai's vacuum probe station, vacuum sealing machine, and other equipment that require a vacuum environment.

Product specifications and parameters:

model	TP22-90
Control method	One-key start
molecular pump	TURBOVAC 90i
Molecular pump pumping speed	90L/S
fore pump	Bipolar rotary vane oil pump (optional: floating vortex dry pump 1.2m3/h)
Front stage pump pumping speed	2m3/h
Composite vacuum gauge	PTR90 (atmospheric to 5 * 10-7Pa)
ultimate vacuum	10-8Pa
Extraction interface	KF40(可选KF25、KF16)
cooling method	air cooling
System leakage rate	1*10-10Pa.m3/s
power supply	220V 50HZ
Overall dimensions	400 * 340 * 260 (length * height * depth) (unit: mm)
weight	18kg

Instrument usage, maintenance, and fault diagnosis

When installing and operating instruments, collision should be avoided, and the body should be placed flat and not tilted or tilted horizontally to avoid machine malfunctions or abnormal noises.

Use and maintenance of instruments

When transporting the instrument, please unplug the power cord plug first.

Special packaging boxes should be used for instrument transportation to avoid touching any moving parts of the probe station.

After use, it is important to maintain cleanliness and try to blow away any dust to prevent contamination of mechanical precision components, optical components, and electrical contact surfaces, which can lead to a decrease in instrument accuracy.

When cleaning the instrument body, avoid directly splashing water for cleaning. Use a dust-free cloth to gently wipe and blow dry. Do not touch the machine with hard objects to avoid malfunction or danger.

When cleaning the components of the instrument display, you can use lens paper dipped in non-aqueous alcohol to gently wipe from the middle outwards. Non alcoholic beverages are flammable, please use them safely.

When there is a power outage or long-term disuse, or when traveling, please unplug the power cord to maintain the lifespan of the machine.

Operators must strictly follow the requirements to ensure the accuracy of data and the normal use of instruments.

Troubleshooting of common faults

When using this instrument, you may encounter some problems. The following table lists common faults and their solutions.

symptom	Possible reasons	solution
Turn on the main switch and there is no display on the monitor	No voltage input from external power supply The power switch is damaged	Check the power cord Replace the power switch
Poor vacuum degree	Vacuum pump damaged	Check the vacuum pump
	There is a leak in the system	Check for system leaks and replace parts
	Vacuum gauge contaminated	Shut down the system and contact the manufacturer for repair
	The pipeline or cavity is contaminated	Clean the surface of the pipeline or cavity
Pressing the button is invalid	Improper operation, safety interlock exists within the system	Check if there are any errors in the operation
Pressing the button is invalid	Damaged buttons or loose wires	Check if the circuit is loose, if the buttons are damaged, and contact the manufacturer's after-sales service
Abnormal noise from the front stage pump	The air breaking valve is not closed	Check if the vacuum breaking solenoid valve is closed
Abnormal noise from the front stage pump	The mechanical pump is damaged	Shut down the system and contact the manufacturer for repair
Molecular pump abnormal noise	There are foreign objects inside the pump body	Turn off the system power, put the molecular pump in a stopped state, open the flange to remove foreign objects; Check the damage condition and contact the manufacturer
Molecular pump abnormal noise	Molecular pump bearing damaged	Shut down the system and contact the manufacturer