UVISEL PLUS Elliptical Polarization Spectrometer

Spectral range from FUV to NIR: 190-2100nm

UVISEL PlusElliptical Polarization SpectrometerProvided an optimized combination of modularity and performance for thin film, surface, and interface characterization.

UVISEL Plus as a productA classic ellipsometer model with accuracy, sensitivity, and stabilityIt adopts PEM phase modulation technology, which provides better stability and signal-to-noise ratio compared to mechanical rotating component technology.The spectral range is from 190nm to 2100nm.

UVISEL Plus integrates the new FastAcqTMRapid collection technology,High resolution sample testing (190-2100 nm) can be achieved within 3 minutesCalibration only takes a few minutes. Based on new electronic devices, data processing, and high-speed monochromators, FastAcq technology can provide users with high-resolution and fast data acquisition. FastAcq is designed for thin film characterization,Dual modulation technologyWe can ensure that you receive excellent test results.

The characteristic of phase modulation technology is high-frequency modulation of 50 kHz, and the signal acquisition process has no moving parts:

• Test the full range of ellipsoidal angles, Ψ (0-90)，Δ (0-360)
• Excellent signal-to-noise ratio from FUV to NIR
• Fast data collection speed of up to 50 milliseconds per point, making it an ideal choice for dynamic research and online measurement

Compared to usingTraditional Elliptical Polarization Spectrometer with Rotating Element Modulation， Phase modulation mode of UVISEL PlusHas higher sensitivity and accuracy in characterizing thin filmsIt can not only detect extremely thin films or interfaces that cannot be observed by other ellipsometers, but also characterize thick films up to 50 µ m.

Testing with back reflectionWhen testing transparent samples, the testing is simple and accurate,No need to scratch the back.

UVISEL Plus is also designed with multiple accessories and optional features, making it easy for customers to choose the appropriate configuration based on their application needs and budget. For example, micro spots are used for pattern samples, automatic angle changers, automatic sample stages, etc.

UVISEL Plus adopts a modular design that can be flexibly expanded. Can be used offlineDesktop measurementIt can also be coupled to coating equipment for online monitoring.

UVISEL Plus can choose the operating interface according to habits, one of which isDeltaPsi2Capable of modeling and fitting processing; The other is the Auto Soft user oriented fully automated sample testing interface, which has an intuitive workflow and is easy for non professionals to operate.

UVISEL Plus equipped with FastAcq technology is the preferred choice in the fields of materials research and processing, flat panel displays, microelectronics, and photovoltaicsUniversal spectroscopic ellipsometer.

UVISEL PlusIt is an ideal tool for materials science research.