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shiwei.yang@163.com
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18501646412
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Room 227, No. 322, Lane 953, Jianchuan Road, Minhang District, Shanghai (Jiao Tong University Science and Technology Innovation Park)
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Yipu (Shanghai) Instrument Co., Ltd
Trace Impurities Analysis System in Semiconductor Gases
NegotiableUpdate on 02/03
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Overview
With the advancement of semiconductor technology and the increasingly active application of semiconductor lasers in fields such as communication and information processing, the types and quantities of special gases used in the manufacturing process are constantly increasing. This system uses gas chromatography to automatically detect trace impurities and component content in semiconductor material gases.
Product Details
Measurable Germane（GeH）Phosphine（PH）Arsenane（AsH）Dichlorosilane（DCS）Trichlorosilane（TCS）Wait for impurities in the semiconductor gas.
High precision automatic detection (easy to operate) can be achieved through high-performance gas chromatography.
Detectable hydrogen gas（H2）Oxygen（O2）Nitrogen gas（N2）Methane（CH4）Carbon monoxide（CO）Carbon dioxide（CO2）TheC2ComponentsC3Impurities such as components.
Measurable Germane（GeH）Phosphine（PH）Arsenane（AsH）Dichlorosilane（DCS）Trichlorosilane（TCS）Wait for impurities in the semiconductor gas.
High precision automatic detection (easy to operate) can be achieved through high-performance gas chromatography.
Detectable hydrogen gas（H2）Oxygen（O2）Nitrogen gas（N2）Methane（CH4）Carbon monoxide（CO）Carbon dioxide（CO2）TheC2ComponentsC3Impurities such as components.
Measurable Germane（GeH）Phosphine（PH）Arsenane（AsH）Dichlorosilane（DCS）Trichlorosilane（TCS）Wait for impurities in the semiconductor gas.
High precision automatic detection (easy to operate) can be achieved through high-performance gas chromatography.
Detectable hydrogen gas（H2）Oxygen（O2）Nitrogen gas（N2）Methane（CH4）Carbon monoxide（CO）Carbon dioxide（CO2）TheC2ComponentsC3Impurities such as components.
