- Phone
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Address
中华人民共和国上海市虹口区宝山路778号
Nanoscope Systems lnc
中华人民共和国上海市虹口区宝山路778号
The CTRM750 thermal reflection microscope is a microscope specially developed by Nanoscope Systems in South Korea for semiconductor research and other purposes. Integrating confocal and heat reflection modules, it can measure the 3D contour of the sample surface while also measuring the actual heat distribution on the sample surface. The thermal reflection module adopts the principle of thermal reflection, collects the change in brightness of the target sample with temperature, and uses a function to obtain the thermal reflection coefficient (κ). By inputting the thermal reflection coefficient (κ) into the system for measurement, the actual temperature value of the target sample's thermal distribution image can be obtained.
Features&Benefits:
1. High resolution non-destructive optical 3D measurement
2. Real time confocal imaging
3. Multiple optical zoom options
4. Automatic tilt compensation
5. Dual Z-axis scanning
6. Compact module size
7. Modular placement
8. Easy to operate
Main functions:
Confocal module
1. 3D contour measurement
In confocal mode, letSet in the Z directionMeasurement range, can obtain high-definition 3D contour images of the sample surface, and can analyze the surface of the sample at different temperaturesInflation data.
2. Real time confocal imaging
Through Live mode, real-time confocal videos of samples can be exported
Thermal reflection imaging module
1. Synchronous
In Synchronous mode, this method obtains thermal reflection images by matching the period of the signal source with the measurement timing of the camera
2. ASynchronous
In Asynchronous mode, the generation period of the signal source is independent of camera measurements. The image measured in this way is then used to obtain a thermal distribution image through a separate TRMeter.
TRViewer (software):

Transient thermal imaging
Application field:
Specifications (parameters):
| module | |||||
| objective lens | magnification | 5X | 10X | 20X | 50X |
| working distance | 34.0 | 33.5 | 20.0 | 13.0 | |
| NA | 0.14 | 0.28 | 0.42 | 0.55 | |
| Confocal field of view | Horizontal(um) | 2800 | 1400 | 700 | 280 |
| Vertical(um) | 2100 | 1050 | 525 | 210 | |
| Range of thermal reflection field of view | Horizontal(um) | 1330 | 655 | 332 | 133 |
| Vertical(um) | 1330 | 655 | 332 | 133 | |
| Light source (pulsed LED) | Basic wavelength | 430,455,505,530,565,590, 617, 625, 660, 700, 730 nm (12 wavelength) | |||
| output power | 120 ~ 3000 mW (wavelength dependent) | ||||
| image sensor | Scientific CMOS | ||||
| Active imaging pixels | 2048x2048 pixel | ||||
| Active thermal imaging pixels | 1024x1024 pixel | ||||
| Spatial resolution (horizontal) | 0.5 um | ||||
| Thermal resolution | 1˚C | ||||
| Thermal reflection imaging mode | Steady state (Asynchronous FFT, 4-Bucket) Transient | ||||
| Time resolution in transient mode | 50 nsec ~ 1 msec | ||||
| Electric heating plate | Heating range | RT to 110˚C | |||
| Heating/cooling rate | · 2min. to heat from RT to 90˚C | ||||
| X. Y, Z stage | Travel range: 18x18x14mm | ||||
| Electric Z-stage | Travel range: 60mm | ||||
| X. Y stage is used for scanning head movement | Travel range: 13x13mm | ||||
| PC | voltage | 100 to 240 VAC, 50/60 Hz | |||
| current | 500W Max | ||||