Swiss VAT vacuum valve - vacuum multi valve device

Swiss VAT vacuum valve - vacuum multi valve device

Swiss VAT is a vacuum valve manufacturer specializing in the design and production of high-precision vacuum valves. Their products are widely used in fields such as semiconductors, photovoltaics, flat panel displays, and scientific research, and are known for their high reliability, long lifespan, and sealing performance.

1. Company background

Swiss VAT is a vacuum valve manufacturer specializing in the design and production of high-precision vacuum valves. Their products are widely used in fields such as semiconductors, photovoltaics, flat panel displays, and scientific research, and are known for their high reliability, long lifespan, and sealing performance.

2. Core product series

(1) Single valve product

• series model：

• angle valve(such as VAT 54 series): Suitable for high vacuum (HV) and ultra-high vacuum (UHV) environments.

• straight-through valve(such as VAT 47 series): Low flow resistance design, suitable for rapid vacuuming.

• gate valve(such as VAT 19 series): Metal sealed, high temperature resistant (up to 450 ° C), used in semiconductor process chambers.

• control valveAccurate control of gas flow rate for process pressure regulation.

• Technical Specifications：

• Leakage rate:<10 ⁻⁹ mbar · l/s (metal seal).

• Material: stainless steel, aluminum alloy, surface nickel plating or electrolytic polishing.

• Drive mode: pneumatic, electric or manual.

(2) Multi Valve Systems

• Design features：

• Integrate multiple valves (such as isolation valve, bypass valve and main pump valve) into a single module to simplify the layout of vacuum system.

• Modular design, supporting customized combinations (such as VAT Lockfast) ® Series).

• Quick response (switch time can be as low as 50ms).

• Typical Applications：

• Multi chamber isolation of semiconductor etching/deposition equipment.

• Vacuum path switching of photovoltaic coating system.

3. Core technological advantages

• sealing technology：

• Metal seals (non elastic materials) are suitable for high temperature and corrosive environments.

• Elastic seals (such as fluororubber) are used for economical applications.

• drive system：

• Pneumatic actuators come standard with explosion-proof design, while electric actuators support PLC control.

• intelligent control：

• Supports industrial protocols such as PROFINET and EtherCAT for real-time monitoring of valve status.

4. Typical application areas

• Semiconductor Manufacturing: Wafer transfer chamber, etching equipment.

• photovoltaic industryVacuum isolation of PECVD and ALD equipment.

• Research equipmentSynchrotron radiation source, particle accelerator.

• Industrial vacuumCoating machine, heat treatment equipment.

5. Selection reference

• key parameters：

• Diameter size (DN16 to DN400).

• Pressure range (from atmospheric pressure to 10 ⁻¹⁰ mbar).

• Compatible with gases (corrosive/inert).

• certification standard：

• SEMI F47 (Semiconductor Equipment Voltage Fluctuation Resistance Standard).

• CE/UL certification.

6. Service and Support

• Provide customized design, fast delivery, and global technical support.

• Online configuration tools (such as VAT Configurator) assist in selection.

Swiss VAT vacuum valve - vacuum multi valve device