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Address
Room 2902, No. 188 Yan'an Middle Road, Changning District, Shanghai
Shanghai Maoshuo Machinery Equipment Co., Ltd
Room 2902, No. 188 Yan'an Middle Road, Changning District, Shanghai
Swiss VAT 61.6- High Vacuum Butterfly Control and Isolation Valve
61.6 HV control butterfly valve provides excellent pressure control and isolation performance. With its fast and precise motion controller (0.45 seconds), it is a solution for fine control and isolation in CVD processes. As a throttling element, the butterfly plate changes the conductivity of the valve port. The integrated pressure controller of 61.6 calculates the required plate position to reach the set pressure as quickly as possible.
The isolation function of the 61.6 series is specifically designed to avoid high sealing wear of butterfly valves. Through its central outer plate axis and the special geometric shape of the valve body and sealing seat, the sealing friction is reduced and the sealing performance is improved.
The 61.6 series has been installed in thousands of demanding applications under various process conditions, proving its excellent reliability. The 61.6 series has a robust design and direct installation options, as well as reduced and convenient maintenance, and performs excellently in all aspects.
Various design options in terms of body materials, surface treatment, elastomers, flange connections, sealing materials, special dimensions, and special control algorithms (adaptive, fixed PI downflow/soft pump) simplify the integration of the 61.6 series with various vacuum applications.
The 61.6 HV control butterfly valve is made of hard anodized aluminum or stainless steel material and equipped with ISO-KF and ISO-F standard flange joints. Can integrate customized flanges from customers, as well as special features such as integrated heaters and insulation. FFKM/FKM elastomers (FKM as standard) can be provided upon request.
Features:
Pressure control and isolation
Running very fast
Onboard software for local operation
Reliable operation can be achieved under harsh process conditions
Advantages:
Better process controllability
Long normal running time/unrestricted performance
Low operating costs
Swiss VAT 61.6- High Vacuum Butterfly Control and Isolation Valve
| size | DN 40 ('), DN 50 (2'), DN 63 ('), DN 80 (3'), DN 100 (4') |
|
|---|---|---|
| drive | Integrated controller with stepper motor, field oriented control (FOC) | |
| Valve body material | Hard anodized aluminum or stainless steel | |
| Standard flange | ISO-KF, ISO-F | |
| Leakage rate: valve body | Hard anodized aluminum stainless steel |
< 1 × 10-5mbar ls-1 < 1 × 10-9mbar ls-1 |
| Leakage rate: valve seat | Hard anodized aluminum stainless steel |
< 1 × 10-4mbar ls-1 < 1 × 10-9mbar ls-1 |
| pressure range | Hard anodized aluminum stainless steel |
< 1 × 10-6mbar 至 1.2 bar (abs) < 1 × 10-8mbar 至 1.2 bar (abs) |
| Number of switches before maintenance1) | pressure control isolation |
2 million times 250000 times (DN 40-50) 100000 times (DN 63-100) |
| temperature | valve body controller |
≤ 120 °C Maximum 50 ℃ (recommended ≤ 35 ℃) |
| material | Aluminum valve body/plate Stainless steel valve body/shaft |
EN AW-6082 (3.2315) AISI 316L (1.4404 or 1.4435) |
| seal | valve plate feedthrough component |
fluororubber fluororubber |
| feedthrough component | Rotating feedthrough component | |
| Installation location | The valve seat side faces the compartment |



