Swiss VAT Vacuum Butterfly Valve 61.3- Butterfly Control Valve

61.3 high vacuum butterfly control valve can provide excellent pressure control performance. With its fast and precise action controller (0.1 seconds), the 61.3 butterfly control valve is an ideal solution for fine control in CVD and ALD processes. The valve plate can act as a throttling element to change the flow characteristics of the valve opening. The integrated pressure controller of the 61.3 butterfly control valve can calculate the required valve plate position to achieve the set pressure as soon as possible.

This series of products is designed for harsh downstream processes with particles in the airflow. Even with high particle loads and the presence of debris deposited due to design, the 61.3 butterfly control valve can still maintain normal operation.

The 61.3 series has been installed in thousands of demanding applications under various process conditions, proving its reliability. With its sturdy design, direct installation options, and simple and easy maintenance, the 61.3 series is convincing in every aspect.

Various design options in valve body materials, surface treatment, elastomers, flange connections, special dimensions, and special control algorithms (adaptive, fixed PI downstream/soft suction) can simplify integration in different vacuum applications.