Shanghai MaFu Furnace Technology Single Temperature Zone Plasma PECVD System

NegotiableUpdate on 01/27

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

MFLPECVD408-12 is a tube furnace system for PECVD system. Composed of a vacuum tube furnace, radio frequency power supply, gas supply system, and vacuum system. The maximum temperature can reach 1200 degrees, using a 30 stage temperature control instrument, K-type thermocouple, and a furnace made of high-purity alumina ceramic fibers. This equipment can be used for growing nanowires or preparing various thin films using CVD method.

Product Details

1Product description

IIProduct Features

1. Convert the gas inside the quartz vacuum chamber into an ionic state through an RF power supply.
2. PECVD requires lower temperatures for chemical vapor deposition compared to conventional CVD
3. The stress level of the deposited film can be controlled by the frequency of the RF power supply
4. PECVD has a higher chemical vapor deposition rate, better uniformity, consistency, and stability than ordinary CVD.
5. Widely used in the growth of various thin films, such as SiOx, SiNx, SiOxNy, and amorphous silicon (a-Si: H).

2、 Technical parameters

Device Model	MFLPECVD408-12
tubular furnace	Temperature control range	Room temperature -1200 ℃
	Operating Temperature	≤1100℃
	Heating zone length	400mm
	quartz tube	Diameter 80mm, length 1400mm (pipe diameter optional 50, 60, 100)
	temperature control accuracy	＜1000 ±0.1℃ ； ≥1000±1℃
	Constant temperature fluctuation	± 1 ℃ (testing point at 1000 ℃)
	heating rate	Recommended temperature below 1000 degrees ≤ 10 ℃/min, with the fastest heating rate ≤ 30 ℃/min
	Cooling rate	Above 700 ℃ ≤ 10 ℃/min
	Furnace temperature	The surface temperature of the furnace body is less than room temperature+10 (measured at 1000 ℃)
	temperature measuring element	Type K thermocouple
	Temperature control mode	Fuzzy PID control and self-tuning regulation, intelligent 30 segment programmable control, with super temperature and couple breaking alarm function
	voltage power	220V 3KW
gas supply system	Pneumatic channel	4 routes
	Air flow control	Proton flow controller (seven star flowmeter)
	control accuracy	±1.5%F.S
	repeatability accuracy	±0.2%F.S
	flow range	1-500 SCCM
	Mechanical pressure gauge	A mechanical pressure gauge is installed on the panel and connected to the mixed air tank, with a range of -0.1 to 0.15 Mpa



vacuum system Option 1 (Low Vacuum: Mechanical Pump)	power supply	220V
	ultimate vacuum	5X10^-1Pa
	pumping speed	2 liters per second
	Vacuum barrier valve	KF25
	model	VRD-8
	Motor power	0.4KW
vacuum system Option 2 (High Vacuum: Mechanical Pump+Molecular Pump Unit)	model	GZK-16-600
	power supply	AC100-240 50/60HZ
	power	1KW
	weight	25KG
	Ultimate pressure	*1.010-4Pa**
	Inlet and exhaust interfaces	KF40
	Maximum flow rate of chiller	10L/MIN
	vacuum gauge	Composite vacuum gauge
	vacuumcontrol accuracy	± 1%
	Measurement range of vacuum gauge	1.0x10 - 1.0x10-5pa
power supply (Plasma Generator)	Power output range	0-500W
	Power stability	≤±5W
	operating frequency	RF:13.56MHZ±0.005%
	matching method	automatic
	cooling method	air cooling
	noise	<50dB







safety	working environment	RT±5-40℃
	Usage guarantee	Open the door, power off, over temperature alarm, leakage protection, over temperature protection




	tubular furnace	a
Factory List	vacuum system	a set
	gas supply system	a set
	RF power supply	a set
	High temperature gloves	Caston, a pair
	Furnace hook	a handful
	trachea	a
	Equipment Manual	a copy
	Instrument manual	a copy
	Warranty Card	a copy
Product selection	Mobile furnace rack	stainless steel
Product selection	Touch screen intelligent instrument panel	50 segments of programming that can be connected to a computer. Through a dedicated computer control system, remote control, real-time tracking, historical recording, output reports, and other functions can be achieved for single or multiple electric furnaces.

Note: Pipe diameter options: 50/60/80/100/120/150/200/300 mm,

The temperature zone can be divided into multiple temperature zones such as dual temperature zone, triple temperature zone, etc,

Please contact customer service.