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Semiconductor industry testing solutions

NegotiableUpdate on 12/20
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Overview
Semiconductor industry testing solutions: providing specialized inspection and measurement solutions for cutting related processes to ensure the reliability of the final product is a crucial task. High speed detection of defects such as cutting lines, cracks, scratches, impurity particles, and missing Die requires the comprehensive use of multiple technical means and strategies to ensure product quality and production efficiency.
Product Details

Semiconductor industry testing solutions


Fully automatic Framed Wafer AOI equipment

ProEye 01

半导体行业检测解决方案

Providing specialized inspection and measurement solutions for cutting related processes to ensure the reliability of the final product is a crucial task. High speed detection of defects such as cutting lines, cracks, scratches, impurity particles, and missing Die requires the comprehensive use of multiple technical means and strategies to ensure product quality and production efficiency.


半导体行业检测解决方案

Fully automatic wafer infrared AOI equipment

ProEye 02

半导体行业检测解决方案


Devices using autonomous infrared optical systems rely on theirThe functionality and design meet the precise requirements for infrared and visible light in various detection applications. This system not only integrates professional and rich optical components, but also hasThe imaging quality ensures the accuracy and reliability of the detection results.


半导体行业检测解决方案

Fully automatic wafer AOI equipment

ProEye 03

半导体行业检测解决方案


This device is independently developed and hasThe wafer inspection system with independent intellectual property rights is designed specifically for scenarios that require automation, high efficiency, and high precision in wafer and chip production processes. We have conducted in-depth analysis of the characteristics of various samples and finely optimized the accuracy, stability, and ease of operation of defect detection, striving to meet diverse detection needs. The device provides both automatic and manual operation modes, which can serve as an efficient and stable production equipment, as well as a flexible and convenient research and development tool, providing users withTesting solutions.

半导体行业检测解决方案

Semi automatic wafer optical acquisition equipment

Spectator on


半导体行业检测解决方案


SpectView SA is a microscopic automation solution independently developed by Xili Technology, which integrates a high-precision motion platform, laser active focusing module, optical microscopy control, and advanced image processing algorithms. It is specifically designed for automatic image acquisition of wafers in semiconductor manufacturing processes for comprehensive and accurate detection and analysis.


半导体行业检测解决方案

半导体行业检测解决方案

半导体行业检测解决方案

Semiconductor industry testing solutionsTechnical Specifications

Wafer Type

Raw Wafer

Framed Wafer


Wafer Size

6' (150mm) 8' (200mm)


Illumination method

Bright/Dark/Mixed


Objective Magni magnification

2X 5x 7.5X

10X

Image Resolution (µ m/pixel)

1.600 0.640 0.427

0.320

Camera Field of View (mm)

11.20 x 11.20 4.48 x 4.48 2.98 x 2.98

2.24 x 2.24

Maximum Capacity (WPH @ 8 ') Max Throughput

90 15 7

4

Inspection Accuracy

Up to 0.5µm (CD) / 1.0um (defect), @ 10X


Damage rate

< 10 PPM