SHIMADZU Shimadzu molecular pump

NegotiableUpdate on 05/07

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

SHIMADZU Shimadzu Turbo Molecular Pump is mainly used to provide a vacuum environment for the manufacturing of solar cells and semiconductors. Shimadzu molecular pumps have world-class exhaust capabilities and a range of products that can meet the process requirements of different solar cell modules and silicon chips. With the expansion of the market, our development has never stopped.

Product Details

SHIMADZU Shimadzu molecular pump

Shimadzu TPM is mainly used to provide a high vacuum environment for manufacturing semiconductor devices, solar cells, and flat panel displays.
The TMP produced by Shimadzu has international standard gas throughput and pumping speed, which can meet the increasingly stringent process requirements of semiconductor manufacturing. For example, enabling manufacturers to deposit and etch semiconductor thin films on large-area silicon wafers.

By generating a vacuum environment through the high-speed rotation of the turbine, the vacuum extraction effect of TMP has reached the molecular flow level. Manufacturing semiconductors and flat panel displays requires a clean, oil-free vacuum environment to maintain excellent equipment operation. The technical performance, reliability, and global technical support network provided by Shimadzu make Shimadzu TMP an integral part of such application areas. Shimadzu produces multiple lineup TMP product series. Each series of products has different uses.

In addition to temperature control function and special corrosion-resistant coating, the TMP-2404/3304/4304 series with high gas throughput has a pumping speed range of 2100 L/s to 4400 L/s, and has potential applications in various fields.
Each model of TMP in the compact and energy-saving TMP-X1605/V2304 series is equipped with an integrated power module, which consumes 15% less power than models with independent power modules.
In addition to integrated power supply, the TMP-X3405/X4304 series also has temperature control function and corrosion-resistant coating, which can meet the strict requirements of process flow in the manufacturing of semiconductors and flat panel displays (FPDs).
In addition, many products in the TMP-203 to 1003 series also have excellent compression ratios and ultimate pressure levels, enabling high vacuum.

Shimadzu magnetic levitation turbo molecular pump TMP-3003LM

The Shimadzu magnetic levitation bearing turbomolecular pump in Japan adopts a five axis control magnetic bearing system, which does not require oil lubrication. During operation, there is no friction, making it a truly oil-free, maintenance free, and installation free turbomolecular pump.

Provide Shimadzu TURBO Pump Japan Shimadzu TMP full range molecular pump sales/repair/maintenance

Large exhaust flow rate
• Excellent corrosion resistance
Compact looking controller
• Countermeasures for dealing with generated products (optional parts)
• Various monitoring functions
• Corresponding network access
• Adjustable pump speed
• Reduction in electricity consumption
• Suitable for various specifications
No need for adjustment (when replacing the pump cable, there is no need to adjust the controller again)
No need for batteries

Wide range and high throughput
• Supports digital power supply
• Various monitoring functions
• Can connect to the internet
• Passed CE certification, SEMI S2 certification, and

Some models of Shimadzu TURBO Pump for repair and maintenance of Shimadzu molecular pumps in Japan:

TMP-X系列 TMP-X2905LMTC、TMP-X3405LMTC

TMP-LMTC 系列 TMP-3403LMTC、TMP-4203LMTC

TMP-MP/MPC 系列 TMP-1103MP、TMP-1103MPC

TMP-LMP/LMPC 系列 TMP-1103LMP、TMP-1103LMPC

TMP-B/SER 系列 TMP50、TMP-B300、TMP280-SER

TMP-I/L-SER 系列 TMP280-I-SER、TMP280-L-SER、TMP1500-L-SER

TMP-UE/LM-SER 系列 TMP802-LM-SER、TMP-2001-UE-SER、TMP-3001-LM-SER

TMP-V series

TMP-V1704LM、TMP-V2304LM、TMP-V2304LM (PB) 、TMP-V3304LM、TMP-V3304LM(F)

TMP-LMF/LMB series

TMP-1503LMF、TMP-2804LMB/LMF、TMP-3304LMB/LMF、TMP-3403LMB/LMF、TMP-4304LMB/ LMF、TMP-3804LMF/LMC

TMP-M/MC 系列 TMP-203M/MC、TMP-203M-G1TMP-303M/MC、TMP-403M/MC、TMP-803M/MC、TMP-1003M/MC、TMP-1003MC-U2、TMP-1303M/MC、TMP-1503LMP/LMC、TMP-2003M/MC、TMP-2003MC-U2、TMP-2003MC-U1、TMP-2203M/MC、TMP-3203M/MC

TMP-LM/LMC series

TMP-203LML/LMC、TMP-303LM/LMC、TMP-403LM/LMC、TMP-803LM/LMC、TMP-803LM-G1、TMP-1003LM/LMC、TMP-1303LM/LMC、TMP-1303LMC-G1、TMP-1503LM、TMP-2003LM/LMC、TMP-2003LM-3、TMP-2203LM/LMC、TMP-2804LM/LMC、TMP-3003LM/LMC、TMP-3203LM/LMC、TMP-3203LMC-A1、TMP-3303LM/LMC、TMP-3304LM/LMC、TMP-3403LM/LMC、TMP-3403LMC-K1、TMP-H3603LMC、TMP-H3603LMC-A1、TMP-H3606LM、TMP-3804LMC、TMP-4203LMC、TMP-4203LMC-T1、TMP-4304LM/LMC