Magnetic levitation bearing type composite molecular pump TG-M series

Magnetic levitation bearing type composite molecular pump TG-M series

The turbo molecular pump consists of multiple layers of rotor blades and stator blades. The following figure shows the relationship between the angle and rotation direction of the blades. Gas molecules enter the pump from the high vacuum side, adhere to the rotor blades, and will detach in different directions according to the Maxwell distribution. However, due to the tilt angle and rotation of the blades, molecules fly into the next layer and easily pass through the stator blades before descending. At the same time, gas molecules that fly in from the lower layer and reverse after passing through the fixed blades can also fly back to the next layer by colliding with the rotor blades. The angle of the blade is the angle at which the upper layer of gas molecules are more likely to pass through (due to a larger difference between the direction of the exhaust flow and the reverse flow), while the lower layer of gas molecules are less likely to reverse (due to a larger ratio between the direction of the exhaust flow and the reverse flow). In the molecular domain, turbo molecular pumps exert their basic performance through the rotor blades and stator blades

Main Features

Oil free ultra vacuum environment

Mechanical gas molecule exhaust (dynamic exhaust), with approximately the same exhaust velocity for all gases

Can discharge rare gases and corrosive gases

Can continuously discharge high flow gas

The pressure range for work is wide. (～10-10Pa）.

OSAKAMagnetic levitation bearing type composite molecular pump TG-M series

Using magnetic levitation bearings to achieve oil-free exhaust, with a long maintenance cycle. Provide products with exhaust speeds ranging from 300L/s to 3400L/s.

TG397M / TG427M / TG907M / TG1307M

The special features of the new magnetic levitation bearing type turbo molecular pump TG397M/TG427M/TG907M/TG1307M

• Provincial Power Design

• Work data, bearing contact times, model information, etc. can all be stored in the molecular pump body. Even if the controller is replaced during maintenance, the data can be transferred

• Multiple communication specifications (compatible with EtherCAT)

• International specifications

• Compliant with CE, SEMI-S2, NRTL specifications

  Application scenarios:

  
  

• Semiconductor manufacturing equipment

• FPD manufacturing equipment

• Solar cell manufacturing equipment

• Processing of optical components such as glass/lenses

• Thin film processing

• Accelerator/Space Environment Experiment Equipment

  Technical parameters:

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