Rapid detection of thin films and surfaces using a reference spectroscopic ellipsometer

Accurion RSESpectral reference ellipsometer

Spectral reference ellipsometer (RSE) designed for high-speed thickness mapping in quality control. It can accurately measure from 0.1 nm to 10 μ m; The thickness of m. Recording 200 complete spectra per second, it is possible to study an area of 100mm x 100mm in 12 minutes and simultaneously obtain 67000 spectra.

RSE is a special type of ellipsometer that compares a reference sample with a measured sample, measures the differences between them, and performs ellipsometry analysis on the measured sample. There are no optical components that require rotation or modulation during the measurement process, and complete, high-resolution spectral ellipsometry data can be obtained in a single measurement. Usually, 200 spectral ellipsometry data can be collected per second. By equipping a synchronized X/Y two-dimensional automatic sample stage, it is possible to measure and obtain the film thickness distribution map of large-area samples within a few minutes. Since the reference compensation system is still based on the ellipsometer principle, it is necessary to fit the measurement data to an optical model to obtain optical parameters such as refractive index and film thickness. In order to achieve high-speed data processing speed, lookup table fitting has been implemented. Before measurement, a lookup table will be calculated. Then, the measurement data can be fitted in real-time and with high resolution.

Main functions:

• Single reference spectral ellipsometry measurement

• 200 full spectral ellipsometry data per second

• Real time data processing for evaluating film thickness

• Spot size: 50 x 100um (incident angle=60 °) micro light spot

• Thin film thickness measurement range:<1nm~10um

• Spectral range: 450-900 nm

Application:

• Wafer inspection

• Pollutant detection

• Thickness of ultra-thin film and intermediate layer

• Thin layer on transparent substrate

•