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Shanghai Maomo Scientific Instrument Co., Ltd

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Ellipsoidal microscope

NegotiableUpdate on 01/04
Model
Nature of the Manufacturer
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Product Category
Place of Origin
Overview
Accurion EP4 Elliptical Microscope $r $n Purpose: Measurement of thickness and optical constants (n, k values) of multilayer thin films
Product Details

Accurion EP4Ellipsoidal microscope

Purpose: Measurement of thickness and optical constants (n, k values) of multilayer films


  • The lateral resolution (x/y direction) is as small as 1 micron, and the measurement accuracy of film thickness is 0.1 nanometer.

  • Selective measurement function: realize selective ellipsometry measurement of microstructure samples and small samples

  • Direct imaging with full microscope field of view, replacing traditional single point measurement

  • Spot cutting technology truly achieves ultra-thin transparency; Non back bottom reflection ellipsometry measurement of thin films on substrates

  • Multiple technologies are used in combination, such as atomic force microscopy (AFM),

Surface Plasmon Resonance (SPR), Reflectance Spectroscopy (RefSpec),

Raman Spectrometer (Raman Spec), Quartz Crystal Microbalance (QCM),

White light interferometer (WLI) and LB slot/membrane balance, etc


椭偏显微镜



Accurion EP4Ellipsoidal microscope

Purpose: Measurement of thickness and optical constants (n, k values) of multilayer films


  • The lateral resolution (x/y direction) is as small as 1 micron, and the measurement accuracy of film thickness is 0.1 nanometer.

  • Selective measurement function: realize selective ellipsometry measurement of microstructure samples and small samples

  • Direct imaging with full microscope field of view, replacing traditional single point measurement

  • Spot cutting technology truly achieves ultra-thin transparency; Non back bottom reflection ellipsometry measurement of thin films on substrates

  • Multiple technologies are used in combination, such as atomic force microscopy (AFM),

Surface Plasmon Resonance (SPR), Reflectance Spectroscopy (RefSpec),

Raman Spectrometer (Raman Spec), Quartz Crystal Microbalance (QCM),

White light interferometer (WLI) and LB slot/membrane balance, etc