Process Ozone Analyzer for Semiconductor Dry Cleaning Equipment

Process Ozone Analyzer for Semiconductor Dry Cleaning EquipmentIt is a gas detection module designed for measuring high concentrations of ozone, used to detect the concentration of gaseous ozone in industrial processes. Based on the principle of ultraviolet spectroscopic absorption, the ozone concentration detection is achieved by utilizing the different absorption forces of ozone gas towards specific ultraviolet rays. The detection chamber structure and constant temperature control design that are resistant to high-pressure impact are adopted, which has precision and reliability.

application field

This instrument is mainly used to measure the concentration of gaseous ozone generated during semiconductor chip manufacturing, water treatment, and ozone research processes, with a measurement range of up to0-400mg/L.

Product featurespoint
①High stability;

②Adopting an automatic control system;

③Design of high-purity contact materials;

④Temperature and pressure、light sourcereal-timecompensationStable and accurate data in different environments;

⑤The straight design of the air path makes product installation more convenient;

⑥The sealing ring is made of perfluoroether material, which is more resistant to ozone corrosion.

Process Ozone Analyzer for Semiconductor Dry Cleaning Equipmenttechnologyparameter
quantity Cheng:0400mg/L
essence degree：1%F.S
heavy againsex：1%F.S

zero float Move:1% F.S/month
response time：2 seconds to 95%

Gas flow rate:0.5-25L/min

Pressure range:0-115psi
analog output：0-5V

Serial communication:RS485， Baud rate 9600bps

Power input:15V

pick up 口：316L stainless steel 1/4CCR joint

Preheating time:15min

Operating Temperature5～45℃

Standard temperature:0℃
ruler Inch:170*55*134.9mm
heavy Quantity:1.1k