NS3500 G Large Non Contact 3D Laser Scanner

NegotiableUpdate on 05/06

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

NS-3500G is a reliable 3D non-contact scanner. Real time confocal microscopy images are achieved through fast optical scanning modules and signal processing algorithms. We have * * solutions for measuring and detecting micro 3D structures, such as semiconductor chips, FPD products, MEMS devices, glass substrates, material surfaces, etc.

Product Details

NS3500G Large Non Contact 3D Laser Scanner

NS-3500GIt is a reliable 3D non-contact scanner.Real time confocal microscopy images are achieved through fast optical scanning modules and signal processing algorithms. We have * * solutions for measuring and detecting micro 3D structures, such as semiconductor chips, FPD products, MEMS devices, glass substrates, material surfaces, etc.

Features & Benefits(Performance and advantages):

High resolution non-destructive optical 3D measurement with automatic tilt compensation
Real time confocal imagingSimple data analysis mode
Multiple optical zoom optionsDouble Z-scan

Large scale splicingFeature detection of semi transparent substrates
real-timeCCD bright field and confocal imagingNo sample preparation
autofocus

Application field(Application field):

NS-3500 is a promising solution for measuring low dimensional materials.

Can measure the height, width, angle, area, and volume of micrometer and submicron structures, such as

-Semiconductor: IC graphics, bump height, coil height, defect detection, CMP process

-FPD products: touch screen detection, ITO pattern, LCD pillar spacing height

-MEMS devices: 3D structural profile, surface roughness, MEMS graphics

-Glass surface: thin-film solar cells, solar cell textures, laser patterns

-Material research: Mold surface inspection, roughness, crack analysis

Specification:

Model	Microscope NS-3500						remark
	Controller NS-3500E
Objective magnification		10x	20x	50x	100x	150x
Observation/measurement range	Horizontal (H): μ m	1400	700	280	140	93
	垂直 (V): μm	1050	525	210	105	70
Scope of work: mm		16.5	3.1	0.54	0.3	0.2
Numerical aperture (N.A.)		0.30	0.46	0.80	0.95	0.95
optical zoom		x1 to x6
Total magnification		178x to 26700x
Observation/measurement optical system		Pinhole confocal optical system
height measurement	Measure scanning range	Long scan: 10mm [NS-3500-T]
	display resolution	0.001 μm
	Repetition rate σ	0.010 μm					Note 1
Width measurement	display resolution	0.001 μm
	Repetition rate 3 σ	0.02 μm					Note 2
Frame memory	pixel	1024x1024, 1024x768, 1024x384, 1024x192, 1024x96
	Monochrome image	12 bit
	color image	8-bit for RGB each
	height measurement	16 bit
frame rate	Surface scanning	20 Hz to 160 Hz
	Line scanning	~8 kHz
automatic function		automatic gain
Laser confocal measurement light source	wavelength	405nm
	output	~2mW
	Laser grade	Class 3b
Laser receiving element		PMT (Photomultiplier Tube)
Optical observation light source	lamp	10W LED
Optical observation camera	imaging element	1/2 "color image CCD sensor
	Record resolution	640x480
	auto-adjust	Gain, Shutter Speed, White Balance
Data processing unit		PC
power supply	power supply voltage	100 to 240 VAC, 50/60 Hz
	Current consumption	500 VA max.
weight	microscope	Approx. ~200 kg (Measuring head unit : ~12 kg)
	controller	~8 kg

Note 1: Conduct 100 measurements on a standard sample (with a step size of 1 μ m) using a 100 ×/0.95 objective lens

Note 2: Conduct 100 measurements on the standard sample (5 μ m spacing) using a 100 ×/0.95 objective lens.