Mass flow controller

G300CMass flow controllerCharacteristics

High precision, high-resolution control

Low power, power<2W

Integrate 20 types of basic gases

Customizable 10 types of mixed gases

Control parameter self-tuning function

Digital control, RS-485 Modbus RTU communication mode

Wide flow range

No preheating required

No installation direction restrictions

Has high repeatability and reliability

Adopting electromagnetic proportional valve, with long service life and fast response speed

Comes with temperature compensation, compensation range 0-50 ℃

Internal closed-loop control with high stability

Small package sizeIntroduction to Range and Accuracy

Available range:

最大 0-50 slpm

Minimum 0-1sccm

Please refer to the selection table for the standard range

Range ratio: 1000:1

Full scale accuracy: ± 0.2%

Reading accuracy: ± 0.8%

Repeatability: ± 0.2% FS

Response time:<100ms (adjustable PID control parameters can be reduced)Short response time

Introduction to Digital DesignG300C seriesMass flow controllerStandard high-precision transmissionSensors and digital circuits, digital circuits can complete measurement and controlAll basic functions required. The G300C series adopts standardRS-485 Modbus RTU communication mode. RS-485 bus is the highestCan be extended to 255 devices for simultaneous use.

Application Fields

Gas and liquid chromatographs

Semiconductor process

Environmental monitoring equipment

Micro reaction device and material preparation experimental apparatus（CVD）

gas generator

Gas distribution and mixing system