MTS series 3D morphology measurement equipment

MTS series 3D morphology measurement equipmentStructure of Spectral Confocal Sensor

Spectral confocal displacement sensor is a device that establishes the correspondence between distance and wavelength through the principle of optical dispersion, decodes spectral information using a spectrometer, and obtains position information.

In the spectral confocal displacement sensor system,

The measurement range of the system is influenced by four factors:

1. Spectral distribution range of light source

2. Axial chromatic aberration of dispersive lenses within the working wavelength range

3. Working band of spectrometer

4. Working band of fiber coupler

Spectral confocal advantage

Multi functional spectral confocal sensor

Our optical confocal sensor focuses white light at different distances along the optical axis through a high-quality optical lens, rather than at a single point, with all visible light bands at the focal point. This multifunctional optical sensor has opened up new dimensions for optical measurement technology.

·Any material can be tested - non transparent/transparent materials, diffuse reflection/reflection, absorption, color, rough/polished

·Coaxial testing avoids the influence of shadows

·The slope acceptance and numerical aperture enable measurable angles to reach 45 ° on reflective surfaces and>80 ° on diffuse surfaces

·Z-axis resolution and accuracy - no need for Z-axis scanning to obtain test results, each test point can transmit a test value

·Multi point linear array sensor with ultra fast testing speed allows for parallel testing at multiple points

·A small and constant spot size can achieve high lateral resolution

·Passive optical probe, no need to move any parts or embed electricity

The road ensures high thermal stability, long-term reliability, and repeatability

Comparison of measurement methods

Digital microscope

-Surface morphology requires depth of field overlay, slow speed - small field of view

-The scanning accuracy depends on the Z-axis motor and the depth of field of the objective lens

Laser confocal microscope

-Surface morphology needs to be scanned layer by layer, slow speed - small field of view

-Human made data measurement

Triangular reflection type confocal spectroscopy

-Lower Z-axis resolution

-Scanning is prone to blind spots

-Poor effect of transparent and mirror materials

White light interference

-High usage and maintenance costs

-Not suitable for larger samples and samples with large fluctuations

-Poor effect on samples with rough surfaces

MTS advantages

Non contact non-destructive measurement

Z-axis resolution of up to 20nm

No need for depth of field, faster stacking speed

The surface reflectivity of the sample is not limited

Provide all surface 3D information

Customizable scanning area

Can be connected to Q-DTS

Can be connected to Xili Avocado AI

MTS series 3D morphology measurement equipmentTechnical Specifications

① Above 2kHz, the test range decreases with increasing frequency

② Vertical mirror measurement at 20 ° C

The provided data comes from tests in typical applications and may differ from tests in other specific situations. Subsequent printing errors, revisions, and updates may also result in differences from the technical parameters listed in the table. Therefore, we cannot guarantee the consistency of the technical parameters, measurement results, and information provided for this product in the table.