MKS DRE Testing System

MKS DRE Testing Systemdescription

The MKS MultiGas  6030 Fourier transform infrared spectrometer is a multi gas spectrometer based on Fourier transform infrared. It has sensitivity from ppb to ppm. Widely used for semiconductor production process control and monitoring, gas purity and composition analysis, environmental toxic and harmful gas monitoring, and industrial exhaust gas monitoring. The MultiGas 6030 Fourier transform infrared spectrometer can analyze gas streams containing up to 40% water and can simultaneously analyze and display up to 30 gases. The analyzer stores calibration spectra, thus saving the cost of the gas cylinder. In addition, the operator will also find that the MultiGas  6030 Fourier transform infrared spectrometer is easy to operate and maintain.

The MultiGas 6030 Fourier transform infrared spectrometer consists of a 2102 Fourier transform infrared spectrometer, a high-throughput sampling unit, professional analysis software, and an independent quantitative spectral library. MultiGas 6030 collects high-resolution infrared spectra and quantitative spectral library analysis, providing high-precision and high-sensitivity measurements for the vast majority of gases and water vapor.

Features and advantages

⚫ PPB-100% sensitivity for the vast majority of toxic and harmful gases

⚫ Easy to move from one place to another, set up in just a few minutes

⚫ Simultaneously analyze and display up to 30 gases

⚫ The analyzer stores calibration spectra, eliminating the cost of gas cylinders

⚫ The sampled gas is heated and maintained at a constant temperature before entering the analysis chamber

application

⚫ Chimney monitor

⚫ Process monitoring improvement and optimization

⚫ Air environment analysis

⚫ Linear detector ensures that all analyzers are maintained under the same calibration conditions

⚫ Frequency and resolution diagnosis to ensure constant calibration

⚫ Provide automatic temperature and pressure compensation to ensure analysis accuracy

⚫ User friendly software interface, can be operated with a little training

⚫ Gas purity analysis

⚫ Combustion emission monitoring

⚫ Monitoring of Selective Silicon Rectification Catalytic Reduction Performance

spectral analysis

Multigas analyzer has a quantitative and multifunctional analysis software that can simultaneously analyze and report the concentration of many mixtures. This software, which can run on a personal computer, can automatically correct the temperature and pressure changes of gases directly measured by the analyzer. The collection and analysis of samples are completed within one second for instantaneous analysis.

Throughout the data organization process, MultiGas software continuously collected and plotted spectra while calculating the concentration of selected gases in SETUP. The display format includes charts and lists of concentration history, measured spectra, and residual spectra. This residual spectrum can be used to determine analysis errors, making QA/QC simple and realistic. After solving all the mentioned spectra, the residual spectrum depicts the "remaining" spectral information once. Once the spectra are collected and stored, they can be reprocessed at any time using the same or different zero point settings.

Specially designed for environmental and process monitoring, the 2102 Fourier transform infrared spectrometer is compact and rough, capable of operating at a spectral resolution of 0.5cm-1, and is fast, sensitive, and stable among available FTIR processing methods! In addition, it can operate in harsh environments and has immunity to high temperatures, vibrations, and temperature changes. What's even more valuable is that the high-speed data processing system is standardized, providing low-noise infrared spectra for analysis.

This spectrometer is connected to a small volume (200mL) multi transformation, 5.11-meter effective channel acquisition chamber. The design of this chamber combines non spherical, non regular mirrors, which can provide twice the optical throughput for traditional variable ventilation chambers. As a choice, a single transformation chamber can be used for gases with high concentration, high corrosion or strong absorption rate, and any chamber can operate between ambient temperature and 150 ℃.

Autonomous Calibration of MKS DRE Testing System Instruments

MultiGas software has multi-point calibration maps that can provide a dynamic range of magnitude up to 10-9 Many nuclear calibrations are provided by it, and users can also calibrate using known concentrations. The MultiGas software verifies the effectiveness of each tool's performance, enabling it to apply a value that has already been calibrated on one machine to any other machine without changing it.