MI-1000/MV-1000 mixed injection system liquid vaporizer

• Gas liquid mixture vaporization method ensures stable vaporization of high boiling point liquids
• Compact design for easy integration
• The vaporization efficiency is higher than traditional vaporization methods
• Generate greater traffic
• The vaporization temperature decreases

measurement

Injection method
The following are the main steps for vaporizing the liquid source and transporting it to the processing chamber.
1. Measure the flow rate of the liquid source and control the liquid volume through valve feedback.
2. The liquid vaporizes instantly.
3. Gas is released to prevent condensation into liquid form.

Due to the high pressure of the carrier gas before the nozzle inside the injector, effective heating can be achieved. The liquid source and heated carrier gas are mixed together in the gas-liquid mixing zone in front of the nozzle. When the mixture passes through the nozzle, the pressure decreases and the mixture vaporizes.