Large area high-speed 3D laser scanner

NegotiableUpdate on 05/06

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

The NS-3500 large-area high-speed 3D laser scanner is an accurate and reliable high-speed confocal laser scanning microscope (CLSM) for 3D measurement. Real time confocal microscopy images are achieved through fast optical scanning modules and signal processing algorithms. We have * * solutions for measuring and detecting micro 3D structures, such as semiconductor chips, FPD products, MEMS devices, glass substrates, material surfaces, etc.

Product Details

NS-3500LLarge area high-speed 3D laser scannerIt is an accurate and reliable methodLarge area high-speed 3D laser scannerReal time confocal microscopy images are achieved through fast optical scanning modules and signal processing algorithms. We have * * solutions for measuring and detecting micro 3D structures, such as semiconductor chips, FPD products, MEMS devices, glass substrates, material surfaces, etc.

Features&Benefits:

High resolution non-destructive optical 3D measurement with automatic tilt compensation

Real time confocal imaging simple data analysis mode

Multiple optical zoom dual Z-scan

Feature detection of large-scale splicing of semi transparent substrates

Real time CCD bright field and confocal imaging without sample preparation

autofocus

Application field:

NS-3500 is a promising solution for measuring low dimensional materials.

Can measure the height, width, angle, area, and volume of micrometer and submicron structures, such as

-Semiconductor: IC graphics, bump height, coil height, defect detection, CMP process

-FPD products: touch screen detection, ITO pattern, LCD pillar spacing height

-MEMS devices: 3D structural profile, surface roughness, MEMS graphics

-Glass surface: thin-film solar cells, solar cell textures, laser patterns

-Material research: Mold surface inspection, roughness, crack analysis

Specification:

Model	Microscope NS-3500						remark
	Controller NS-3500E
Objective magnification		10x	20x	50x	100x	150x
Observation/measurement range	Horizontal (H): μ m	1400	700	280	140	93
	垂直 (V): μm	1050	525	210	105	70
Scope of work: mm		16.5	3.1	0.54	0.3	0.2
Numerical aperture (N.A.)		0.30	0.46	0.80	0.95	0.95
optical zoom		x1 to x6
Total magnification		178x to 26700x
Observation/measurement optical system		Pinhole confocal optical system
height measurement	Measure scanning range	Fine scan: 400 μ m (and/or) Long scan: 10 mm [NS-3500-S]
		Long scan: 10mm [NS-3500-T]
	display resolution	0.001 μm
	Repetition rate σ	0.010 μm					Note 1
Width measurement	display resolution	0.001 μm
	Repetition rate 3 σ	0.02 μm					Note 2
Frame memory	pixel	1024x1024, 1024x768, 1024x384, 1024x192, 1024x96
	Monochrome image	12 bit
	color image	8-bit for RGB each
	height measurement	16 bit
frame rate	Surface scanning	20 Hz to 160 Hz
	Line scanning	~8 kHz
automatic function		automatic gain
Laser confocal measurement light source	wavelength	405nm
	output	~2mW
	Laser grade	Class 3b
Laser receiving element		PMT (Photomultiplier Tube)
Optical observation light source	lamp	10W LED
Optical observation camera	imaging element	1/2 "color image CCD sensor
	Record resolution	640x480
	auto-adjust	Gain, Shutter Speed, White Balance
Data processing unit		PC
power supply	power supply voltage	100 to 240 VAC, 50/60 Hz
	Current consumption	500 VA max.
weight	microscope	Approx. ~50 kg (Measuring head unit : ~12 kg)
	controller	~8 kg

Note 1: Conduct 100 measurements on a standard sample (with a step size of 1 μ m) using a 100 ×/0.95 objective lens

Note 2: Conduct 100 measurements on the standard sample (5 μ m spacing) using a 100 ×/0.95 objective lens.