LU series automatic liquid supply system

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Overview

As a standard configuration, the steam pressure monitoring function can be used to check the blowing efficiency during the replacement of the main tank
Optional weighing sensor to monitor the total amount of residual liquid in the mother tank
The LU-A1000 series features a compact design and an integrated gas system, which significantly reduces size compared to traditional accessories
Easy replacement of components during daily maintenance
The deaerator module is a standard configuration that reduces the risk of liquid bubbling and is suitable for various vaporization systems, including injection and baking applications
Safety standard: SEMI S2/S8/S14, CE mark
Security improvement: Diversified monitoring devices provide fully automatic control. The LU-A1000 series is equipped with an automatic emergency shutdown function, which will be activated in case of system failure
Operability improvement: Fully automated operation steps to prevent operational errors. The operation can also be controlled through the touch panel on the front end of the device