LS wafer cleaning APM-HE30AN0H hollow axis servo motor

NegotiableUpdate on 05/13

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Overview

LS wafer cleaning APM-HE30AN0H hollow shaft servo motor 1, Spinner Motor hollow shaft motor features $r $n1, hollow shaft high-speed motor structure: rated speed: 5000rpm, maximum speed 6000-8000rpm $r $n2, ultra fast acceleration/deceleration time; $r$n3、 Low noise, low vibration, and low shaft end runout coefficient; $r$n4、 The shaft hole adopts a vacuum hollow shaft design, and the design of the shaft end ensures smooth operation of the chunk. The motor power is 750W, and the APM-HE30ACH wafer etching and solidification equipment uses a large hollow motor for wafer cleaning

Product Details

LS wafer cleaning APM-HE30AN0H hollow axis servo motor

•Semiconductor wafer handling robot

•Semiconductor wafer polishing platform

•Pharmaceutical packaging industry

•machine tool

•Medical equipment - CT machine

•PCB drilling and inspection

•SMT placement machine

•Coordinate measuring instrument

•Precision rotary table and indexing table

•Flat panel display processing and assembly line

•Printing machinery

•Automotive parts processing

•Film production

•Solar energy and battery production line

•Special Equipment

•Semiconductor coating and development

•Semiconductor cleaning and etching

•Semiconductor washing tower

LS wafer cleaning APM-HE30AN0H hollow axis servo motor

1、 Characteristics of Spinner Motor Hollow Shaft Motor

1. Hollow shaft high-speed motor structure: rated speed: 5000rpm, maximum speed 6000-8000rpm

2. Ultra fast acceleration/deceleration time;

3. Low noise, low vibration, and low shaft end runout coefficient;

4. The shaft hole adopts a vacuum hollow shaft design, and the design of the shaft end ensures smooth operation of the chunk

LS晶圆清洗APM-HE30AN0H中空轴伺服电机

LS wafer cleaning APM-HE30AN0H hollow axis servo motor

Korean LS Spinner motors and hollow shaft servo motors are used in semiconductor wafer electroplating, coating, debonding, developing, cleaning, solidification, etching, wafer bonding, packaging and testing equipment. Some models are as follows:

1. Hollow axis servo motor

LS晶圆清洗APM-HE30AN0H中空轴伺服电机 100W APM-HB01AAH incremental encoder