LAUDA/Lauda Semistat thermoelectric process thermostat

Semistat thermoelectric process thermostat

The LAUDA Semistat thermoelectric temperature control system provides a stable and reproducible temperature control system for plasma etching processes. The system dynamically controls the temperature of the electrostatic chuck (ESC) and can be used in any etching process. The basis of the design of thermoelectric temperature control system is temperature conversion based on the Peltier principle. These components can achieve fast and accurate temperature control, meeting the requirements of increasingly smaller device production sizes today.

Provide fast and precise temperature control for rigorous processes

Low energy consumption, system without compressor and refrigerant

The industrial sector occupies a small area, and if placed under the floor, there is no requirement for occupying space

Extremely low filling amount of thermal conductive liquid

Communication module that can be remotely controlled (RS-485 communication protocol)

Shanghai Libao Scientific Instrument Co., Ltd. is the agent of several well-known European and American manufacturers in the field of laboratory and industrial instruments in China. The main brands include:

German LAUDA heating and cooling constant temperature cycle, German DIEHM glass reaction kettle, PUR adhesive reaction device, Swiss PC Laborsystem planetary stirrer, German BOLA/SICCO PTFE fittings/drying oven, British COWIE PTFE stirring, temperature measuring container and other accessories, HAMILTON Hamilton injection needle, micro injector; There are also various types of imported high and low temperature water baths/oil baths and other European and American products, providing high-quality and specialized system solutions for experimental instrument needs!

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