Hydrogen gas mass flow controller

The MFC330 series gas mass flowmeter/controller consists of a capillary column flow sensor, a bypass diversion system, a high-precision proportional valve, and a control system.

After the measured gas enters, it first passes through the sensor and bypass diversion system. Real time measurement of gas flow rate by sensors, and dynamic response of high-precision proportional valves to quickly adjust gas flow rate to the set value. The closed-loop structure for measuring and regulating flow rate allows MFC330 to maintain stable flow control even with changes in ambient temperature or fluctuations in inlet and outlet air pressure.

Product Features

Accurate quality flow measurement/control

Fast response, high repeatability

Not affected by temperature and pressure

Large range of working pressure difference: 0-1MPa

Low voltage loss optional

Optional all metal proportional valve

Integrated display optional

Economically effective solutions

Main parameters

The medium requires clean and dry gas

98+gas types available

Range 0-2, 10, 20, 50, 100, 300, 500 sccm

0-1，2，5，10，20，30，50，100，200，500slpm

Measurement range 0.5% F.S. (1:200)

Control range 1% -100% FS. (1:100)

Accuracy ± 1% F.S

Repetitive accuracy ± 0.2% F.S

Linearity ± 0.2% F.S

Control response time<3 seconds

Preheating time 5 minutes (T95), 30 minutes

Valve normally closed