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Bennett Automation Instrument (Shanghai) Co., Ltd
HORIBASTECE40MK3/E5MK3 Mass Flow Controllers from Japan
NegotiableUpdate on 05/24
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Overview
HORIBASTECE40MK3/E5MK3 Mass Flow Controllers from Japan
Product Details
HORIBA STEC E40MK3/E5MK3 Flow Controllers from Japan
The HORIBA STEC E40MK3/E5MK3 flow controllers from Japan are mass-produced products that achieve cost reduction without changing the necessary quality characteristics of the mass flow controller. The material and leakage specifications are completely consistent with the SEC-400 and SEC-500 series of general model products. The main purpose is gas flow control for process use, mass production based on a focus on repeatability and limited gas types and flow rates, achieving significant cost reduction. It is most suitable for situations where the flow rate is constant and stable control is repeated for a long time. And it is also applicable to simple flow control in research institutes.
Characteristics of HORIBA STEC E40MK3/E5MK3 Flow Controllers from Japan
1. Has a wide range of uses
2. Pursuing cost advantages and achieving cost reduction
HORIBA STEC E40MK3, Japan
Japan HORIBA STEC E40MK3/E50MK3 Flow controller specifications
| model | SEC - (Mass Flow Controller) | E40/E40MK3 | E50/E50MK3 |
| SEF - (Mass Flow Meter) | E40 | E50 | |
| Applicable gas types * 1 | Non corrosive gases (MK3 model suitable for N2, O2, air, etc.) H2、Ar、He) | ||
| Material of gas contact part | SUS316L fluorinated rubber PTFE、 Magnetic stainless steel | ||
| Valve model | Off when not powered on | ||
| Standard flow range (N2 corresponding F.S.) | 10/20/30/50/100/ 200/300/500 SCCM 1/2/3/5/10 SLM | 20/30 SLM | |
| Flow control range (Suitable for SEC series) |
2〜100% F.S. | ||
| Flow measurement range (Suitable for SEF series) |
0〜100% F.S. | ||
| response speed | Within 1 second (T98) | ||
| Flow accuracy | ±1% F.S. | ||
| linearity | ±0.5% F.S. | ||
| repeatability | ±0.2% F.S. | ||
| Differential pressure value at work (Suitable for SEC series) |
10 SCCM〜5 SLM：50〜300kPa(d) 10〜30 SLM:100〜300kPa(d) | ||
| pressure of use (Suitable for SEF series) |
Below 300kPa (G) | ||
| Voltage resistance | Below 1MPa (G) | ||
| External leakage rate | Below 1 × 10-8 Pa · m3/s (He) | ||
| Environmental temperature for use | 5-50 ℃ (accuracy guarantee: 15-35 ℃) | ||
| Flow setting signal | 0.1~5VDC (input impedance above 1M Ω)/2~100% F.S | ||
| Traffic output signal | 0-5VDC (minimum load resistance of 2k Ω) | ||
| drive power supply | +15VDC ±5% 50mA -15VDC ±5% 150mA 3VA | ＋15VDC ±5% 50mA −15VDC ±5% 200mA 3.9VA | |
| Standard connector * 2 | 1/4SWL type | ||
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