HORIBASTEC-Z512MGX Digital Mass Flow Controller from Japan

Summary
Quality flow meters are crucial components in semiconductor manufacturing equipment. The stability of its operation often becomes a key factor in the success or failure of semiconductor processes.
HORIBA STEC, As a flowmeter manufacturer with a global market share of over 35% * 1, we have consistently provided high-quality and multifunctional products for the semiconductor industry. Now, with a brand new technology, HORIBA STEC is promoting a new type of mass flow controller globally: the Z500 series.
Compared to the old models, the Z500X series has achieved a new breakthrough and is destined to change the future of flow control technology. While providing all the functions required by customers for flow control, the conversion of composite gas and composite flow has been achieved. Customers can easily change the gas type and range of the flowmeter according to their process needs.
In addition, through technological innovation in product materials, the Z500 series fully meets the design requirements of RoHS green products, enhancing product value for customers.
The high-performance Z500 series flowmeter will bring you more surprises. The world is witnessing the birth of a new type of mass flowmeter that is about to change the entire semiconductor industry.
*Refer to VLSI's 2007 research report.
*2. Composite gas and composite flow function.
feature
High precision: Set flow rate value ± 1.0%
The linear accuracy of MFC is compensated by polynomial approximation curves, which ensures high control accuracy within various control ranges In order to improve the control accuracy of various actual gas types, HORIBA STEC has developed a standard gas measurement system and collected calibration data for various process gases based on extensive experiments.
high-speed response
The SEC-Z500X uses the latest developed "modifiable PID" system to ensure that any change between two set flow points is completed within 1 second. When different flow rates are set, the PID data will be automatically adjusted, and even after changes in gas type and flow range, the PID data can be automatically optimized to achieve high-speed response.
Composite gas and composite flow scheme
HORIBA STEC's new product makes it easy for customers to change gas types and flow rates on-site Our Z500 setup software is simple and easy to use Even better, the completion of these changes does not require dismantling MFC from the system. In this way, the quantity of spare parts for customers can be greatly reduced, while saving time and costs.
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