HORIBASTEC-N112MGMSEN-114MGM Gas Mass Flow Controller from Japan

Summary
Based on years of market development experience leading cutting-edge technology products, we offer a range of quality flow meter products that meet customer needs.
Gas is widely used in various industrial fields, from the research and manufacturing of solar cells and fuel cells. This highly regarded renewable energy project has received support from around the world; Research and manufacturing of semiconductors, liquid crystal panels, and light-emitting diodes (LEDs) used in the electronics industry. In these manufacturing processes, accurate measurement and control of the flow rates of various gases significantly improve work efficiency, thereby saving energy and increasing productivity. HORIBA STEC is committed to the development of quality flow meters, providing services for first-class manufacturing processes including semiconductor, optoelectronic, and LED manufacturing, and will continue to develop new products to meet customer needs
feature
HORIBA STEC can provide a complete set of products that meet your needs.

model	Select signal transmission mode	Select power supply
SEC-N102 series	Digital signal transmission ▶ RS485 F-NET protocol Analog signal transmission ▶ 0～5VDC	±15VDC (±5%) HORIBA STEC'S can provide PE series power products.
SEC-N104 series	DeviceNet signal transmission	Following ODVA standards
SEC-N106 series	PROFIBUS signal transmission Analog signal transmission ▶ 0 to 5VDC, 0 to 10VDC, 4 to 20mA	Following the PROFIBUS standard 24VDC(13 to 32VDC)

This model is suitable for various small to large flow needs.
The flow control range is 2-100% of the calibrated full range


high precision
High precision (with the set point as the reference)The linearity of MFC will be compensated by an approximate polynomial curve. This helps achieve high-precision control over all flow control ranges. In order to further improve the accuracy of actual gas flow rate, the calibration data of various process gases will be verified according to the HORIBA STEC standard gas measurement system.

High response speed can be achieved throughout the entire flow control range
■ Newly variable PID algorithm: 1 second high-speed response Latest variable PID algorithmThe SEC-N100 series is equipped with the latest developed "Variable PID System", which can achieve high response speed within 1 second for all setpoints. When you change the calibration full-scale and gas type, the variable PID will continuously change according to the current set point, and its PID parameters will also be optimized accordingly.

Multi gas, multi range solution
Specialized software gives users the ability to freely change specificationsThe latest multi gas and multi range system enables users to freely change the type and range of gases.

Committed to cost considerations and utilizing new design concepts
As an alternative to the N100 series, HORIBA STEC can also offer Z500 series products with ultra clean treatment and piezoelectric ceramic valves. Please note that without prior notice, modifications may be made to certain components and product processes that require increased productivity, but will not involve changing product specifications.
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