HORIBASTEC-E60 Gas Mass Flow Controller

generalwant

Main purpose:
Combustible gas control for industrial furnaces and heat treatment furnaces
Combustible gas control for needle welding
Flow control of various combustible gases such as hydrogen, oxygen, propane, argon, etc
Flow control of cleaning gas
Gas flow control on experimental setup
Require automated flow control equipment
Hope to grasp the total amount of traffic consumed by devices, etc

Feature:
Control from small traffic to large traffic with charm and price;
High speed response, reaching the flow set value within 1 second. Equipped with the latest designed control circuit and high-speed response flow sensor, the initial stability of the flow rate is relatively good based on the received power signal. Through the implementation program of flow rate changes, it is possible to maintain a stable flow rate for measurement and control. (High traffic corresponding model: SEC-E80 can respond within 2 seconds)
High precision, ± 1.0% F.S
High reliability, with automatic zeroing function
Accurate quality flow control can be achieved; The so-called mass flow controller is a type of controller that measures mass flow and can automatically adjust any flow rate based on the received power signal. Therefore, even if the usage environment (such as temperature and pressure) changes, there is no need for correction, and accurate quality flow control can be carried out.
Adopting automatic flow function valves; The flow control valve adopts an automatic flow function control type. When there is no power supply to the main body, the valve will automatically adjust to the closed state. During power outages, the flow can also be controlled to a minimum.

Working Principle:
1. The gas entering at the entrance is diverted to the flow sensor and bypass.
2. The temperature change information formed by the mass flow ratio is obtained through sensors and exchanged into electrical signals in the circuit.
3. This signal is output to the outside through an amplification circuit, a correction circuit, and a linear power signal of 0-5V, and is also input to the comparison control circuit.
4. The set signal obtained externally and the flow signal obtained from the sensor form a differential signal in the comparison circuit, which is then transmitted to the next valve drive circuit.
5. The flow control valve should strive to make the differential signal "0" as much as possible, so that the flow rate is always controlled at the set flow rate.


• specifications

  SEC - (Mass Flow Controller)	E60
  Applicable gas types * 1	N2, O2, Air, H2, Ar, C3H8, CH4, C4H10
  Material of gas contact part	SUS316. Fluorinated rubber, magnetic stainless steel
  Valve model	Off when not powered on
  Standard flow range (N2 corresponding F.S.)	50/100 SLM
  Flow control range (suitable for SEC series)	5-100% F.S.
  Flow measurement range (suitable for SEF series)	0-100% F.S.
  response speed	Within 1 second (T98)
  Flow accuracy	±1% F.S.
  linearity	±0.5% F.S.
  repeatability	±0.5% F.S.
  Differential pressure value at work (suitable for SEC series)	100-300kPa(d)
  Use pressure (suitable for SEF series)	Below 350kPa (G)
  Voltage resistance	Below 1MPa (G)
  External leakage rate	Below 1 × 10-7Pa? M3/s (He)
  Environmental temperature for use	5-45 ℃ (accuracy guarantee: 15-35 ℃)
  Flow setting signal	0.25-5VDC (input impedance above 1M Ω)/5-100% F.S
  Traffic output signal	0-5VDC (minimum load resistance 2k Ω)
  drive power supply	＋15VDC ±5% 50mA −15VDC ±5% 200mA 3.9VA
  Standard connector * 2	3/8SWL type

• Technical Specifications

  *1: Regarding gas types not recorded, please consult and negotiate separately.
  *2 can also be used with connectors other than standard connectors. Please consult and negotiate separately.
  SEC-E40/E50/E40MK3/E50MK3 are equipped with automatic reset function.
  The inlet pressure is SEC-E40/50/60/E40MK3/E50MK3: maximum value 300kPa (G); SEC-70/80: Maximum value below 350kPa (G).
  SCCM and SLM are symbols representing the flow units of gases (mL/min, L/min, at, 0 ℃, 101.3kPa).