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Bennett Automation Instrument (Shanghai) Co., Ltd
HORIBASTEC-8440F8450 High Temperature Mass Flow Controller from Japan
NegotiableUpdate on 05/24
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Overview
HORIBASTEC-8440F8450 High Temperature Mass Flow Controller from Japan
Product Details
Summary
A mass flow meter is a device used to measure or control gas flow rate. Flow rate is generally divided into volumetric flow rate and mass flow rate, but the volume of gas is easily affected by external temperature and pressure. To accurately measure, measurement conditions need to be constantly changed to match the constantly changing external environment. And mass flow is the use of measuring the quality of gas, which is not affected by the external environment, thus providing high-precision flow detection and control, and has wide applications in semiconductor manufacturing processes.
feature
It is a mass flow controller equipped with a piezoelectric valve that can be used in high-temperature environments.
1. Suitable for high temperature: can meet baking at 150 ℃
2. There are product models in the product lineup that can meet the temperature requirements for use
3. Ultra clean type: The gas receiving part is made of all stainless steel construction
4. Most suitable for flow control of organic metal materials, low vapor pressure materials, and corrosive gases used in MOCVD
specifications
Product related images and others
A mass flow meter is a device used to measure or control gas flow rate. Flow rate is generally divided into volumetric flow rate and mass flow rate, but the volume of gas is easily affected by external temperature and pressure. To accurately measure, measurement conditions need to be constantly changed to match the constantly changing external environment. And mass flow is the use of measuring the quality of gas, which is not affected by the external environment, thus providing high-precision flow detection and control, and has wide applications in semiconductor manufacturing processes.
feature
It is a mass flow controller equipped with a piezoelectric valve that can be used in high-temperature environments.
1. Suitable for high temperature: can meet baking at 150 ℃
2. There are product models in the product lineup that can meet the temperature requirements for use
3. Ultra clean type: The gas receiving part is made of all stainless steel construction
4. Most suitable for flow control of organic metal materials, low vapor pressure materials, and corrosive gases used in MOCVD
specifications
| SEC-8340SL is equipped with a main heating element | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 5/10/20/50/100/200/500 SCCM 1/2 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 80-100 ℃ |
| SEC-8340SM Body heating heater | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 5/10/20/50/100/200/500 SCCM 1/2 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 100-120 ℃ |
| SEC-8440LSL | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 5/10/20/50/100/200/500 SCCM 1/2/3/5 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 15-35 ℃ |
| SEC-8450LSL | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 10/20 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 15-35 ℃ |
| SEC-8455LSL | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 30/50 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 15-35 ℃ |
| SEC-8460LSL | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 50/100 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 15-35 ℃ |
| SEC-8440LSM | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 5/10/20/50/100/200/500 SCCM 1/2/3/5 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 35-60 ℃ |
| SEC-8450LSM | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 10/20 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 35-60 ℃ |
| SEC-8455LSM | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 30/50 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 35-60 ℃ |
| SEC-8460LSM | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 50/100 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 35-60 ℃ |
| SEC-8440LSH | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 5/10/20/50/100/200/500 SCCM 1/2/3/5 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 60-80 ℃ |
| SEC-8450LSH | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 10/20 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 60-80 ℃ |
| SEC-8455LSH | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 30/50 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 60-80 ℃ |
| SEC-8460LSH | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 50/100 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 60-80 ℃ |
| SEC-8440SL | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 5/10/20/50/100/200/500 SCCM 1/2 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 80-100 ℃ |
| SEC-8450SL | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 3/5/10 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 80-100 ℃ |
| SEC-8455SL | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 10/20 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 80-100 ℃ |
| SEC-8460SL | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 20/30/50 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 80-100 ℃ |
| SEC-8440SM | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 5/10/20/50/100/200/500 SCCM 1/2 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 100-120 ℃ |
| SEC-8450SM | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 3/5/10 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 100-120 ℃ |
| SEC-8455SM | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 10/20 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 100-120 ℃ |
| SEC-8460SM | |
| Material of gas contact part | SUS-316L |
| Valve Type | NO: When not powered on: On |
| Standard flow range | 20/30/50 SLM |
| Flow control range | 2~100% F.S. (full scale) |
| Flow accuracy | ± 1.0% F.S. (full scale) operating temperature: 100-120 ℃ |
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