Grade 100 clean oven

Grade 100 clean oven

BXDH-180F

Used for pre-treatment baking before coating silicon wafers, gallium arsenide, lithium niobate, glass and other materials in semiconductor manufacturing, hard film baking after coating, and high-temperature baking after development; Also applicable to electronic LCD displays LCD、CMOS、IS、 Production and research departments such as pharmaceuticals and laboratories; It can also be used for drying, heat treatment, aging and other high-temperature tests of non-volatile and non flammable and non explosive materials.

1、 Main technical indicators

1.1Temperature range: Room temperature+30 ℃~200℃； Heating rate: 3-6 ℃/min

1.2. Temperature fluctuation: ± 0.5 ℃;

1.3 Temperature uniformity: 100 ℃± 2 ℃, 200 ℃± 4 ℃, 250 ℃± 5 ℃,(No load)Test after 20 minutes of constant temperature；

1.4 Studio size (single chamber):600 (width)*500 (deep)*600 (high)mm；

1.5. AdoptingFuji temperature controller from JapanController LCDDisplay and setting, PID automatic calculation, film setting, accuracy ± 0.3% FS;

1.6Cleanliness (class):100

1.7. Power: 12.0KW

1.8. Power supply: 380V/50Hz

II Airflow control method：

Grade 100 clean oven

BXDH-180F

2.1. Forced circulation ventilation, the control system automatically calculates the output of the heater through PID calculation based on the set temperature point to control the output, ultimately achieving balance

2.2. Airflow circulation device: built-in air conditioning room, circulation duct, and ventilation motor;

2.3 Heating method: Imported SHEATHED HEATER dust-free and oxidation free electric heating generator is used.

2.4 Partition requirements: Each cavity is equipped with two partitions, made of punched stainless steel plates, and the four sides of the partitions are in close contact with the box body.

3、 Box structure

3.1. Outer wall material of the box: The outer box is made of high-quality cold-rolled sheet with spray coating, which is corrosion-resistant and aesthetically pleasing;

3.2. Inner wall material of the box: High quality stainless steel plate is used for full circumference argon arc welding, and cleaned with alkaline soda water to effectively prevent the generation of dust on the machine itself;

3.3. Thermal insulation material: using ultra-fine and ultra white materialFiberglass 120K grade high-density insulation cotton filling effectively prevents heat waste.