Grade 100 clean oven

Grade 100 clean ovenBXDH-180F

Used for pre-treatment baking before coating silicon wafers, gallium arsenide, lithium niobate, glass and other materials in semiconductor manufacturing, hard film baking after coating, and high-temperature baking after development; Also applicable to electronic LCD displays LCD、CMOS、IS、 Production and research departments such as pharmaceuticals and laboratories; It can also be used for drying, heat treatment, aging and other high-temperature tests of non-volatile and non flammable and non explosive materials.

Grade 100 clean ovenBXDH-180F

1、 Main technical indicators

1.1Temperature range: Room temperature+30℃～200℃； Heating rate: 3-6 ℃/min

1.2. Temperature fluctuation: ± 0.5 ℃;

1.3 Temperature uniformity: 100 ℃± 2 ℃, 200 ℃± 4 ℃, 250 ℃± 5 ℃,（no-loadconstant temperatureDetect after 20 minutes);

1.4 Studio size (single chamber):600 (width)*500 (deep)*600 (high)mm；

1.5. AdoptingJapan”Fuji "temperature controller, controllerliquid crystalDisplay and settingsPID automatic calculation, film setting, accuracy ± 0.3% FS;

1.6Cleanliness（class）：100

1.7. Power: 12.0KW

1.8. Power supply: 380V/50Hz

II Airflow control method：

2.1. Forced circulation ventilation, the control system automatically calculates the output of the heater through PID calculation based on the set temperature point to control the output, ultimately achieving balance

2.2. Airflow circulation device: built-in air conditioning room, circulation duct, and ventilation motor;

2.3 Heating method: Imported SHEATHED HEATER dust-free and oxidation free electric heating generator is used.

2.4 Partition requirements: Each cavity is equipped with two partitions, made of punched stainless steel plates, and the four sides of the partitions are in close contact with the box body.

3、 Box structure

3.1. Outer wall material of the box: The outer box is made of high-quality cold-rolled sheet sprayed with plastic，Corrosion resistant, aesthetically pleasing and elegant；

3.2. Inner wall material of the box: AdoptingpremiumStainless steel plates are welded using argon arc welding and cleaned with alkaline soda water to effectively prevent the generation of dust on the machine itself;

3.3. Insulation materials: AdoptingUltra fine and ultra whitefiberglass120K grade high-density insulationcottonFill, effectivelandPreventing waste of thermal energy.

3.4. The box body is an integral combination structure, with an electrical control cabinet at the top and an electrical control system installed inside, and a cavity at the bottom. The temperature around the electrical control cabinet should not exceed 50 degrees Celsius to prevent personnel from getting burned.

3.5. Equipped with a nitrogen interface, it can exhaust the air inside the box, ensuring that the baked silicon wafers are carried out in nitrogen; The nitrogen flowmeter needs to be installed on the front of the box, with the inlet installed at the rear of the box, and an 8mm diameter inlet installed. ）

3.6Inside the box, there arehigh-efficiency filtrationdeviceEffective filtering99.99% particles above 0.3um achieve better cleaning effect.

4、 Measurement and Control System:

4.1 Control panel: The panel has complete functional identification, and the operation of the equipment is controlled by "start" and "stop" respectively. Various status indicators are complete, including constant operation indicator, program operation indicator, heating indicator, timed end indicator, and over temperature indicator

4.2 Controller requirements: AdoptFujiTemperature ControllerAccording to the process requirements, constant temperature operation and multi-stage program editing can be set.

4.3 Operation mode: Program runningConstant operation(Default program running on device)；

Constant operation: The device is equipped with an electromagnetic lock, which locks the door when the device is running； After the program is completed, the box door can be opened.

4.4. Adopt an independent over temperature protection device to ensure that the temperature does not exceed the limit; When the protective device is activated, it automatically cuts off the heating power supply and triggers an audible and visual alarm, as well as an over temperature protection control deviceLEDdisplay controller

4.5. Overtemperature protection and emergency switch of the electrical control cabinet.

4.6 Cooling method:natural cooling.

5、 The equipment has Security protection measures:

5.1. Safe and reliable grounding;

5.2. Studio over temperature protection;

5.3. Heater short circuit protection;

VITransportation and on-site installation of equipment

6.1 Installation equipment: 1 hydraulic forklift or crane

6.2 Equipment Unloading/Placement: After the equipment is transported to the customer's site, the customer inspects the equipment for any damage. If there is no damage, the customer is responsible for unloading the equipment to the location specified by the customer

6.3 Preparation before installation: Before installing the equipment, customers need to make relevant preparations in advance. Specific parameters can be found in (normal operating conditions of the equipment)

6.4 On site construction: The customer is responsible for: positioning the equipment at the equipment usage site, including equipment dismantling and installation, wiring the external wires of the equipment to the equipment main switch, and the exhaust system of the factory building (including the hood, etc.).

7 Product execution standards:JB/T5520-91Technical conditions for drying oven

8 Equipped with technical documentation: Technical data: Product certificate, user manual, instrument user manual, etc