Gas mass flow controller

NegotiableUpdate on 05/07

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

The gas mass flow controller CL-500D can cover a flow rate of 2sccm-50slm for non corrosive gases (relative to N2) ♦ High cost-effectiveness Compatible with RS485 and analog communication ♦ Automatic zeroing function setting to increase process stability

Product Details

Gas mass flow controllerCL-500D

specification
Full Scale Range (N2 Eqv)	Single gas2-5000sccm \|Single gas5-50slm
Control Valve TypeValve Type	Normally open or normally closed solenoid（NC or NO）
Fittingconnection	1/4'VCR or 1/4'Swagelokcompatible
Sealsseal	rubberViton
Response Timeresponse time	wlSec(Exceeding full range)10%）
Accuracyprecision	25%-100%:w ±1%SP(Full range)25%to 100%) 2%-25%:w ±0.25%F.S(Full range)2%to 25%)
Linearitylinearity	wFull QuantityCheng's soil 0.5%
Repeatabilityrepetitiveness	wFull range±0.2%
Differential Pressurepressure difference	7-40psi
Leak Integrityleak rate	Max:1x10-7Pa.m3/sec (He)
Control Rangescope of control	Full range2-100%
Max Operating PressureMaximum operating pressure	70psi
Proof Pressurewithstand pressure	maximum140psi
Communication Typecommunication mode	simulation 0-5V/RS485
Input Powerinput power	+15VDC±2%at 100mA -15VDC±2%at 200mA
Command SignalInput analog signal	analog signal0-5 VDC(Input impedance)＞1M Q）/digital signal0-100%
Output SignalOutput analog signal	analog signal0-5 VDC(Input impedance)＞2M Q）/digital signal0-100%
Power Consumptionpower consumption	4.5W
Temperature Rangetemperature range	5-45 Deg C
Materialsmaterial	316LSS,316SS, PTFE
Weightweight	0.9KG
Surface Finishingsurface treatment	5RA

Gas mass flow controllerCL-500D