FS-3000 Thermal Gas Diverter

The control algorithm achieves stable diversion control by controlling the flow ratio, while utilizing HORIBA STEC control optimization technology to control the upstream pressure of FS-3000. In addition, even if the diversion ratio changes, the control algorithm can still achieve high-speed response to diversion.

• Improve scalability and maintain performance. FS-3000 can separate up to 15 channels through high-speed signal processing. If MFC malfunctions, simply replace the faulty slave.

• Flexible response to required specifications FS-3000 supports multiple gases including mixed gases. In addition, FS-3000 also supports user interfaces such as RS-485 and DeviceNet.