Electronic special gas dedicated gas chromatograph

Semiconductor manufacturing: In the semiconductor manufacturing process, strict requirements are placed on the purity of electronic specialty gases. HA-9660-Plus can detect trace impurities in gases, such as oxygen, nitrogen, moisture, etc., to ensure that gas quality meets production standards. Flat panel display: In the production of liquid crystal displays (LCDs) and organic light-emitting diodes (OLEDs), HA-9660-Plus is used to analyze and control the electronic characteristics used in the production process to ensure the quality and performance of the display panel. $n solar cell: In the production of solar cells, HA-9660-Plus can detect silane, phosphine, etc

　　HA-9660-PlusApplication of Electronic Special Gas Chromatography System

In the field of ultra trace gas analysis, HA-9660-PlusElectronic special gas dedicated gas chromatographPlays a crucial role. It can accurately analyze and monitor the impurity content in electronic specialty gases, ensuring that gas quality meets strict industrial standards. In addition, the instrument is also suitable for research and development fields, helping customers gain a deeper understanding of gas reaction processes and optimize the preparation process of electronic specialty gases.

The PDHID S Pro+detector is an ultra high sensitivity detector that has a high response to almost all inorganic and organic compounds, making it particularly suitable for the analysis of ultra pure gases and capable of detecting detectors at the ng/g (ppb) level. The newly established national standards for gas products stipulate the use of helium ionization detectors instead of traditional thermal conductivity detectors, which improves the analytical capability of gas products. The national standard GB/T 28726-2012 "Gas Analysis - Helium Ionization Gas Chromatography Method", which was mainly drafted by Hua Ai Chromatography, has been officially announced and implemented since February 1, 2013.

Electrical Separation Design: The HA-9660-Plus adopts an electrical separation design that isolates the electrical module from the gas circuit module. This innovation not only reduces electromagnetic interference and improves analysis accuracy, but also greatly enhances the safety of the equipment. The isolation of the circuit and sample analysis section effectively prevents potential cross contamination and safety hazards.

We offer single channel and multi-channel configurations to meet the needs of different customers. Single channel is suitable for single gas analysis, while multi-channel supports simultaneous analysis of multiple components and samples. Especially with the configuration of the PDHID S Pro+detector, it supports ultra trace analysis of multiple gases with high sensitivity and strong stability, making it an ideal choice for the semiconductor industry.