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E-mail
lqu@bjhksr.com
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Phone
15001390595
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Address
A-1403B, Zhichun Building, 118 Zhichun Road, Haidian District, Beijing
Product Categories
Beijing Haike Sirui Optoelectronic Instrument Co., Ltd
Direct drive electric displacement table
NegotiableUpdate on 01/30
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Overview
Directly driving the electric displacement table, the 8MTL series electric translation table adopts three-phase ironless brushless servo motor technology, which can achieve zero gap motion through high precision, repeatability, and low friction. The linear non-contact optical encoder ensures direct control of position with sub nanometer motion resolution. Aluminum oxide alloy ensures high temperature stability, flexibility of 8MTL instrument, excellent long-period kinematics, and no directional system drift. This platform has a small footprint and can be integrated into high-density machines and narrow space applications, and can be used for ultra clean rooms and vacuum (up to 10-3 Torr) applications.
Product Details
Direct drive electric displacement tablesketch:
The 8MTL series electric translation platform adopts three-phase ironless brushless servo motor technology, which can achieve zero gap motion through high precision, repeatability, and low friction. The linear non-contact optical encoder ensures direct control of position with sub nanometer motion resolution. Aluminum oxide alloy ensures high temperature stability, flexibility of 8MTL instrument, excellent long-period kinematics, and no directional system drift. This platform has a small footprint and can be integrated into high-density machines and narrow space applications, and can be used for ultra clean rooms and vacuum (up to 10-3 Torr) applications.
8MTL1301-170
| model | 8MTL1301-170-LEn1-025 | 8MTL1301-170-LEn1-050 | 8MTL1301-170-LEn1-100 | 8MTL1301-170-LEn1-200 |
| itinerary | 170 mm | |||
| Speed fbk sel | Optical Encoder | |||
| Encoder resolution | 25 nm | 50 nm | 100 nm | 200 nm |
| Encoder grating period | 20 µm | |||
| Absolute precision: | ||||
| Before calibration | ±5 µm | |||
| After calibration | ±1 µm | |||
| Bidirectional repeatability accuracy (peak to peak) | ±0.15 µm | |||
| Bidirectional repeatability accuracy (RMS) | ±0.10 µm | |||
| Maximum speed (load capacity 4kg) | <2000 mm/s | |||
| Load capacity (placed at the center) | 30kg | |||
| weight | 4.1kg | |||
8MTL1401-300
| model | 8MTL1401-300-LEn1-025 | 8MTL1401-300-LEn1-050 | 8MTL1401-300-LEn1-100 | 8MTL1401-300-LEn1-200 |
| itinerary | 300 mm | |||
| Speed fbk sel | Optical Encoder | |||
| Encoder resolution | 25 nm | 50 nm | 100 nm | 200 nm |
| Encoder grating period | 20 µm | |||
| Absolute precision: | ||||
| Before calibration | ±5 µm | |||
| After calibration | ±1 µm | |||
| Bidirectional repeatability accuracy (peak to peak) | ±0.15 µm | |||
| Bidirectional repeatability accuracy (RMS) | ±0.08 µm | |||
| Maximum speed (load capacity 4kg) | <2000 mm/s | |||
| Load capacity (placed at the center) | 30kg | |||
| weight | 6.75kg | |||
Direct drive electric displacement table8MTL120XY
| model | 8MTL120XY-LEn1-025 | 8MTL120XY-LEn1-050 | 8MTL120XY-LEn1-100 | 8MTL120XY-LEn1-200 | |
| itinerary | 120 x 120 mm | ||||
| Speed fbk sel | Optical Encoder | ||||
| Encoder resolution | 25 nm | 50 nm | 100 nm | 200 nm | |
| Encoder grating period | 20 µm | ||||
| Absolute precision | Before calibration | ±4 µm | |||
| After calibration | ±0.5 µm | ||||
| Bidirectional repeatability accuracy (peak to peak) | ±0.15 µm | ||||
| Bidirectional repeatability accuracy (RMS) | ±0.10 µm | ||||
| Maximum speed (load capacity 4kg) | <1000 mm/s | ||||
| Load capacity (placed at the center) | 30kg | ||||
| size | 240 x 360 x 75 mm | ||||
8MRL120-15
| model | 8MRL120-15-MEn | |
| angle range | 360 deg | |
| Speed fbk sel | Optical Encoder | |
| Encoder resolution | 0.0000625 deg | |
| Encoder grating period | 0.05 deg | |
| Absolute precision | Before calibration | ±218 µrad/ ±45.00 arcsec |
| After calibration | request | |
| Bidirectional repeatability accuracy (peak to peak) | ±7.30 µrad/ ±1.50 arcsec | |
| Bidirectional repeatability accuracy (RMS) | ±2.90 µrad/ ±0.60 arcsec | |
| eccentricity | ±5.00 µm | |
| jitter | ±19.40 µrad/ ±4.0 arcsec | |
| Maximum speed (no load) | <9000 deg/s / 1500 RPM | |
| load | level | 40 kg |
| vertical | 20 kg | |
| Rotary disc diameter | 90mm | |
| Central aperture | 15mm | |
| weight | 2.6kg | |
8MRL180, 8MRL250
| model | 8MRL180 | 8MRL250 |
| angle range | 360 deg | 360 deg |
| Speed fbk sel | 1Vpp Analoge inductance | |
| Encoder resolution | 2 arcsec | 1 arcsec |
| Bidirectional repeatability accuracy | 5 arcsec | 4 arcsec |
| Jue's accuracy (before calibration) | 50 arcsec | 40 arcsec |
| Axial jump | 30 µm | 30 µm |
| radial runout | 30 µm | 20 µm |
| Maximum speed | 6600 deg/s | 3300 deg/s |
| Horizontal load | 12 kg | 20 kg |
| Vertical load | 12 kg | 15 kg |
| Rotary disc diameter | 180 mm | 250 mm |
| weight | 5 kg | 9 kg |
